JPH0487639U - - Google Patents
Info
- Publication number
- JPH0487639U JPH0487639U JP12972590U JP12972590U JPH0487639U JP H0487639 U JPH0487639 U JP H0487639U JP 12972590 U JP12972590 U JP 12972590U JP 12972590 U JP12972590 U JP 12972590U JP H0487639 U JPH0487639 U JP H0487639U
- Authority
- JP
- Japan
- Prior art keywords
- processed
- semiconductor manufacturing
- electrode plate
- processing liquid
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12972590U JPH0487639U (enFirst) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12972590U JPH0487639U (enFirst) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487639U true JPH0487639U (enFirst) | 1992-07-30 |
Family
ID=31877116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12972590U Pending JPH0487639U (enFirst) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487639U (enFirst) |
-
1990
- 1990-11-30 JP JP12972590U patent/JPH0487639U/ja active Pending
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