JPH0487638U - - Google Patents

Info

Publication number
JPH0487638U
JPH0487638U JP12972190U JP12972190U JPH0487638U JP H0487638 U JPH0487638 U JP H0487638U JP 12972190 U JP12972190 U JP 12972190U JP 12972190 U JP12972190 U JP 12972190U JP H0487638 U JPH0487638 U JP H0487638U
Authority
JP
Japan
Prior art keywords
injection nozzle
pure water
pressure gas
wafer
gas injection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12972190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12972190U priority Critical patent/JPH0487638U/ja
Publication of JPH0487638U publication Critical patent/JPH0487638U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP12972190U 1990-11-30 1990-11-30 Pending JPH0487638U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12972190U JPH0487638U (cs) 1990-11-30 1990-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12972190U JPH0487638U (cs) 1990-11-30 1990-11-30

Publications (1)

Publication Number Publication Date
JPH0487638U true JPH0487638U (cs) 1992-07-30

Family

ID=31877112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12972190U Pending JPH0487638U (cs) 1990-11-30 1990-11-30

Country Status (1)

Country Link
JP (1) JPH0487638U (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07321082A (ja) * 1994-05-27 1995-12-08 Nec Corp 基板の洗浄方法および洗浄装置
JP2015076468A (ja) * 2013-10-08 2015-04-20 株式会社ディスコ スピンナー洗浄装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63110639A (ja) * 1986-10-28 1988-05-16 Nec Corp 集積回路装置の製造方法
JPH02288230A (ja) * 1989-04-27 1990-11-28 Nec Kyushu Ltd 半導体基板の洗浄装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63110639A (ja) * 1986-10-28 1988-05-16 Nec Corp 集積回路装置の製造方法
JPH02288230A (ja) * 1989-04-27 1990-11-28 Nec Kyushu Ltd 半導体基板の洗浄装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07321082A (ja) * 1994-05-27 1995-12-08 Nec Corp 基板の洗浄方法および洗浄装置
JP2015076468A (ja) * 2013-10-08 2015-04-20 株式会社ディスコ スピンナー洗浄装置

Similar Documents

Publication Publication Date Title
JPH0487638U (cs)
JPH0426049U (cs)
JPH0322583U (cs)
JPH0348490U (cs)
JPS62160691U (cs)
JPH0215864U (cs)
JPH02111387U (cs)
JPS58174291U (ja) 長物タンク内面洗浄装置
JPH021261U (cs)
JPH0358635U (cs)
JPS622466U (cs)
JPH02146429U (cs)
JPS6317766U (cs)
JPH0354784U (cs)
JPS62144200U (cs)
JPS59151986U (ja) 人体局部洗浄装置
JPS6438987U (cs)
JPH01122736U (cs)
JPS6289140U (cs)
JPS63177034U (cs)
JPS61103855U (cs)
JPS5993758U (ja) 拡散ウオツシヤ
JPS60158846U (ja) 吸入器
JPS60367U (ja) パイプの自動洗浄装置
JPS62181362U (cs)