JPH0487634U - - Google Patents
Info
- Publication number
- JPH0487634U JPH0487634U JP13020790U JP13020790U JPH0487634U JP H0487634 U JPH0487634 U JP H0487634U JP 13020790 U JP13020790 U JP 13020790U JP 13020790 U JP13020790 U JP 13020790U JP H0487634 U JPH0487634 U JP H0487634U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- exhaust
- semiconductor
- exhaust port
- outside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000002516 radical scavenger Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13020790U JPH0487634U (fr) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13020790U JPH0487634U (fr) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487634U true JPH0487634U (fr) | 1992-07-30 |
Family
ID=31877567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13020790U Pending JPH0487634U (fr) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487634U (fr) |
-
1990
- 1990-11-30 JP JP13020790U patent/JPH0487634U/ja active Pending