JPH0485727U - - Google Patents
Info
- Publication number
- JPH0485727U JPH0485727U JP12849390U JP12849390U JPH0485727U JP H0485727 U JPH0485727 U JP H0485727U JP 12849390 U JP12849390 U JP 12849390U JP 12849390 U JP12849390 U JP 12849390U JP H0485727 U JPH0485727 U JP H0485727U
- Authority
- JP
- Japan
- Prior art keywords
- movable rod
- wafer
- main body
- vacuum
- pallet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12849390U JPH0485727U (de) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12849390U JPH0485727U (de) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0485727U true JPH0485727U (de) | 1992-07-24 |
Family
ID=31875952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12849390U Pending JPH0485727U (de) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0485727U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000308988A (ja) * | 1999-03-18 | 2000-11-07 | Applied Materials Inc | ウェハハンドリングロボット用の機械式グリッパ |
| JP2008172241A (ja) * | 2007-01-11 | 2008-07-24 | Applied Materials Inc | 高温ロボットエンドエフェクタ |
-
1990
- 1990-11-30 JP JP12849390U patent/JPH0485727U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000308988A (ja) * | 1999-03-18 | 2000-11-07 | Applied Materials Inc | ウェハハンドリングロボット用の機械式グリッパ |
| JP2008172241A (ja) * | 2007-01-11 | 2008-07-24 | Applied Materials Inc | 高温ロボットエンドエフェクタ |