JPH048169B2 - - Google Patents
Info
- Publication number
- JPH048169B2 JPH048169B2 JP58238276A JP23827683A JPH048169B2 JP H048169 B2 JPH048169 B2 JP H048169B2 JP 58238276 A JP58238276 A JP 58238276A JP 23827683 A JP23827683 A JP 23827683A JP H048169 B2 JPH048169 B2 JP H048169B2
- Authority
- JP
- Japan
- Prior art keywords
- base
- ring
- piezoelectric element
- piezoelectric elements
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000008602 contraction Effects 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58238276A JPS60131139A (ja) | 1983-12-17 | 1983-12-17 | 微小回転装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58238276A JPS60131139A (ja) | 1983-12-17 | 1983-12-17 | 微小回転装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60131139A JPS60131139A (ja) | 1985-07-12 |
| JPH048169B2 true JPH048169B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-02-14 |
Family
ID=17027778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58238276A Granted JPS60131139A (ja) | 1983-12-17 | 1983-12-17 | 微小回転装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60131139A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0688187B2 (ja) * | 1986-12-19 | 1994-11-09 | キヤノン株式会社 | 回転駆動装置 |
-
1983
- 1983-12-17 JP JP58238276A patent/JPS60131139A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60131139A (ja) | 1985-07-12 |