JPH0481642B2 - - Google Patents

Info

Publication number
JPH0481642B2
JPH0481642B2 JP719088A JP719088A JPH0481642B2 JP H0481642 B2 JPH0481642 B2 JP H0481642B2 JP 719088 A JP719088 A JP 719088A JP 719088 A JP719088 A JP 719088A JP H0481642 B2 JPH0481642 B2 JP H0481642B2
Authority
JP
Japan
Prior art keywords
chamber
bias
back pressure
pressure
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP719088A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01182602A (ja
Inventor
Masatoshi Fujiwara
Mikio Tanaka
Yoshikuni Toki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP719088A priority Critical patent/JPH01182602A/ja
Publication of JPH01182602A publication Critical patent/JPH01182602A/ja
Publication of JPH0481642B2 publication Critical patent/JPH0481642B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
JP719088A 1988-01-16 1988-01-16 パイロツトリレー Granted JPH01182602A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP719088A JPH01182602A (ja) 1988-01-16 1988-01-16 パイロツトリレー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP719088A JPH01182602A (ja) 1988-01-16 1988-01-16 パイロツトリレー

Publications (2)

Publication Number Publication Date
JPH01182602A JPH01182602A (ja) 1989-07-20
JPH0481642B2 true JPH0481642B2 (pm) 1992-12-24

Family

ID=11659122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP719088A Granted JPH01182602A (ja) 1988-01-16 1988-01-16 パイロツトリレー

Country Status (1)

Country Link
JP (1) JPH01182602A (pm)

Also Published As

Publication number Publication date
JPH01182602A (ja) 1989-07-20

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