JPH0479826U - - Google Patents

Info

Publication number
JPH0479826U
JPH0479826U JP12492590U JP12492590U JPH0479826U JP H0479826 U JPH0479826 U JP H0479826U JP 12492590 U JP12492590 U JP 12492590U JP 12492590 U JP12492590 U JP 12492590U JP H0479826 U JPH0479826 U JP H0479826U
Authority
JP
Japan
Prior art keywords
conveyor
cover
sides
upper wall
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12492590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12492590U priority Critical patent/JPH0479826U/ja
Publication of JPH0479826U publication Critical patent/JPH0479826U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP12492590U 1990-11-27 1990-11-27 Pending JPH0479826U (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12492590U JPH0479826U (no) 1990-11-27 1990-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12492590U JPH0479826U (no) 1990-11-27 1990-11-27

Publications (1)

Publication Number Publication Date
JPH0479826U true JPH0479826U (no) 1992-07-13

Family

ID=31872554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12492590U Pending JPH0479826U (no) 1990-11-27 1990-11-27

Country Status (1)

Country Link
JP (1) JPH0479826U (no)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006275731A (ja) * 2005-03-29 2006-10-12 Shibuya Machinery Co Ltd 容器搬送装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5994840A (ja) * 1982-11-22 1984-05-31 Hitachi Plant Eng & Constr Co Ltd ウエハ搬送装置
JPS61108094A (ja) * 1984-10-31 1986-05-26 Kiso Zosen:Kk 集塵船
JPH0298916A (ja) * 1988-10-06 1990-04-11 Takasago Thermal Eng Co Ltd クリーンチューブ装置
JPH02100919A (ja) * 1988-10-06 1990-04-12 Daiko Shiyatoruwaasu Kk 空気浄化搬送通路を備えたコンベアおよびコンベア・ユニット

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5994840A (ja) * 1982-11-22 1984-05-31 Hitachi Plant Eng & Constr Co Ltd ウエハ搬送装置
JPS61108094A (ja) * 1984-10-31 1986-05-26 Kiso Zosen:Kk 集塵船
JPH0298916A (ja) * 1988-10-06 1990-04-11 Takasago Thermal Eng Co Ltd クリーンチューブ装置
JPH02100919A (ja) * 1988-10-06 1990-04-12 Daiko Shiyatoruwaasu Kk 空気浄化搬送通路を備えたコンベアおよびコンベア・ユニット

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006275731A (ja) * 2005-03-29 2006-10-12 Shibuya Machinery Co Ltd 容器搬送装置

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