JPH0479826U - - Google Patents
Info
- Publication number
- JPH0479826U JPH0479826U JP12492590U JP12492590U JPH0479826U JP H0479826 U JPH0479826 U JP H0479826U JP 12492590 U JP12492590 U JP 12492590U JP 12492590 U JP12492590 U JP 12492590U JP H0479826 U JPH0479826 U JP H0479826U
- Authority
- JP
- Japan
- Prior art keywords
- conveyor
- cover
- sides
- upper wall
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12492590U JPH0479826U (en, 2012) | 1990-11-27 | 1990-11-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12492590U JPH0479826U (en, 2012) | 1990-11-27 | 1990-11-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0479826U true JPH0479826U (en, 2012) | 1992-07-13 |
Family
ID=31872554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12492590U Pending JPH0479826U (en, 2012) | 1990-11-27 | 1990-11-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0479826U (en, 2012) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006275731A (ja) * | 2005-03-29 | 2006-10-12 | Shibuya Machinery Co Ltd | 容器搬送装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5994840A (ja) * | 1982-11-22 | 1984-05-31 | Hitachi Plant Eng & Constr Co Ltd | ウエハ搬送装置 |
JPS61108094A (ja) * | 1984-10-31 | 1986-05-26 | Kiso Zosen:Kk | 集塵船 |
JPH0298916A (ja) * | 1988-10-06 | 1990-04-11 | Takasago Thermal Eng Co Ltd | クリーンチューブ装置 |
JPH02100919A (ja) * | 1988-10-06 | 1990-04-12 | Daiko Shiyatoruwaasu Kk | 空気浄化搬送通路を備えたコンベアおよびコンベア・ユニット |
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1990
- 1990-11-27 JP JP12492590U patent/JPH0479826U/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5994840A (ja) * | 1982-11-22 | 1984-05-31 | Hitachi Plant Eng & Constr Co Ltd | ウエハ搬送装置 |
JPS61108094A (ja) * | 1984-10-31 | 1986-05-26 | Kiso Zosen:Kk | 集塵船 |
JPH0298916A (ja) * | 1988-10-06 | 1990-04-11 | Takasago Thermal Eng Co Ltd | クリーンチューブ装置 |
JPH02100919A (ja) * | 1988-10-06 | 1990-04-12 | Daiko Shiyatoruwaasu Kk | 空気浄化搬送通路を備えたコンベアおよびコンベア・ユニット |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006275731A (ja) * | 2005-03-29 | 2006-10-12 | Shibuya Machinery Co Ltd | 容器搬送装置 |