JPH0479083U - - Google Patents

Info

Publication number
JPH0479083U
JPH0479083U JP12385190U JP12385190U JPH0479083U JP H0479083 U JPH0479083 U JP H0479083U JP 12385190 U JP12385190 U JP 12385190U JP 12385190 U JP12385190 U JP 12385190U JP H0479083 U JPH0479083 U JP H0479083U
Authority
JP
Japan
Prior art keywords
shaped
fan
center
rack
chuck body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12385190U
Other languages
English (en)
Japanese (ja)
Other versions
JPH077102Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990123851U priority Critical patent/JPH077102Y2/ja
Publication of JPH0479083U publication Critical patent/JPH0479083U/ja
Application granted granted Critical
Publication of JPH077102Y2 publication Critical patent/JPH077102Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
JP1990123851U 1990-11-26 1990-11-26 ローダー装置のチヤツク装置 Expired - Lifetime JPH077102Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990123851U JPH077102Y2 (ja) 1990-11-26 1990-11-26 ローダー装置のチヤツク装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990123851U JPH077102Y2 (ja) 1990-11-26 1990-11-26 ローダー装置のチヤツク装置

Publications (2)

Publication Number Publication Date
JPH0479083U true JPH0479083U (enrdf_load_stackoverflow) 1992-07-09
JPH077102Y2 JPH077102Y2 (ja) 1995-02-22

Family

ID=31871537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990123851U Expired - Lifetime JPH077102Y2 (ja) 1990-11-26 1990-11-26 ローダー装置のチヤツク装置

Country Status (1)

Country Link
JP (1) JPH077102Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07132482A (ja) * 1993-11-02 1995-05-23 Ckd Corp ウェハ把持装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58160076A (ja) * 1982-03-19 1983-09-22 ヤマハ発動機株式会社 ロ−ダ用ロボツト
JPS59156688A (ja) * 1983-02-21 1984-09-05 ダイキン工業株式会社 三点把持形ハンド
JPS6052282A (ja) * 1983-08-30 1985-03-25 エスエムシ−株式会社 ロボット用ハンド
JPS62201689U (enrdf_load_stackoverflow) * 1986-06-16 1987-12-22

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58160076A (ja) * 1982-03-19 1983-09-22 ヤマハ発動機株式会社 ロ−ダ用ロボツト
JPS59156688A (ja) * 1983-02-21 1984-09-05 ダイキン工業株式会社 三点把持形ハンド
JPS6052282A (ja) * 1983-08-30 1985-03-25 エスエムシ−株式会社 ロボット用ハンド
JPS62201689U (enrdf_load_stackoverflow) * 1986-06-16 1987-12-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07132482A (ja) * 1993-11-02 1995-05-23 Ckd Corp ウェハ把持装置

Also Published As

Publication number Publication date
JPH077102Y2 (ja) 1995-02-22

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