JPH0479083U - - Google Patents
Info
- Publication number
- JPH0479083U JPH0479083U JP12385190U JP12385190U JPH0479083U JP H0479083 U JPH0479083 U JP H0479083U JP 12385190 U JP12385190 U JP 12385190U JP 12385190 U JP12385190 U JP 12385190U JP H0479083 U JPH0479083 U JP H0479083U
- Authority
- JP
- Japan
- Prior art keywords
- shaped
- fan
- center
- rack
- chuck body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Feeding Of Workpieces (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990123851U JPH077102Y2 (ja) | 1990-11-26 | 1990-11-26 | ローダー装置のチヤツク装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990123851U JPH077102Y2 (ja) | 1990-11-26 | 1990-11-26 | ローダー装置のチヤツク装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0479083U true JPH0479083U (enrdf_load_stackoverflow) | 1992-07-09 |
JPH077102Y2 JPH077102Y2 (ja) | 1995-02-22 |
Family
ID=31871537
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990123851U Expired - Lifetime JPH077102Y2 (ja) | 1990-11-26 | 1990-11-26 | ローダー装置のチヤツク装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH077102Y2 (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07132482A (ja) * | 1993-11-02 | 1995-05-23 | Ckd Corp | ウェハ把持装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58160076A (ja) * | 1982-03-19 | 1983-09-22 | ヤマハ発動機株式会社 | ロ−ダ用ロボツト |
JPS59156688A (ja) * | 1983-02-21 | 1984-09-05 | ダイキン工業株式会社 | 三点把持形ハンド |
JPS6052282A (ja) * | 1983-08-30 | 1985-03-25 | エスエムシ−株式会社 | ロボット用ハンド |
JPS62201689U (enrdf_load_stackoverflow) * | 1986-06-16 | 1987-12-22 |
-
1990
- 1990-11-26 JP JP1990123851U patent/JPH077102Y2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58160076A (ja) * | 1982-03-19 | 1983-09-22 | ヤマハ発動機株式会社 | ロ−ダ用ロボツト |
JPS59156688A (ja) * | 1983-02-21 | 1984-09-05 | ダイキン工業株式会社 | 三点把持形ハンド |
JPS6052282A (ja) * | 1983-08-30 | 1985-03-25 | エスエムシ−株式会社 | ロボット用ハンド |
JPS62201689U (enrdf_load_stackoverflow) * | 1986-06-16 | 1987-12-22 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07132482A (ja) * | 1993-11-02 | 1995-05-23 | Ckd Corp | ウェハ把持装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH077102Y2 (ja) | 1995-02-22 |