JPH0479049A - Quality inspecting system for magneto-optical disk - Google Patents

Abstract

PURPOSE:To easily execute a stable quality evaluation with high reliability by enlarging the surface of a magneto-optical disk by an electronic microscope, picking up the image, executing a picture processing to the picture data so as to calculate component composition included on the surface of the magneto- optical disk, deciding the suitability of the composition and outputting the decided result. CONSTITUTION:The electronic microscope enlarges the prescribed observing part of the set magneto-optical disk and picks up the image and in a picture processor 2, the sent picture data is received by a picture data input processing part 21 and stored in a picture memory 22. Continuously based on this picture data in the picture memory 22, an analysis and calculation part 23 analyzes the component composition and stores the result of the quality decision in a data memory 24 corresponding to the identification number of the magneto- optical disk as the inspecting object. According to an output command from a keyboard or for a certain number of inspected disks, the inspected result is outputted from an output control part 25. Thus, the quality of the magneto- optical disk can be automatically inspected on the machine side, and labor can be saved.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to a magneto-optical disk quality inspection system.

(Prior Art) In recent years, with the advancement of computers, the storage capacity of external storage devices has become larger and more compact. In this trend, rewritable magneto-optical disks are attracting attention as something that has recently become popular.

This magneto-optical disk is a very useful storage device for large-capacity computers because it is capable of high-density storage and playback.

However, the current method of measuring the quality of this magneto-optical disk is to observe and inspect the surface using an electron microscope, and no system for automatically inspecting the quality is known.

(Problem to be solved by the invention) As described above, with conventional magneto-optical disks, quality inspection was performed by workers using electron microscopes, which resulted in problems such as instability and problems that could only be determined by skilled workers. was there. In addition, since the inspection is done manually, a great deal of labor is required from the worker to inspect the quality of the magneto-optical disk, and there has been a demand for a reduction in labor.

This invention was made in view of these conventional problems, and its purpose is to provide a magneto-optical disk quality inspection system that can perform stable and reliable quality evaluation without requiring a large amount of manpower. do.

[Configuration of the Invention (Means for Solving the Problems) A magneto-optical disk quality inspection system of the present invention includes an electron microscope that magnifies and images a predetermined portion of the magneto-optical disk, and an image obtained from the electron microscope. An image processing device that imports data, performs image processing, analyzes elemental components on the magneto-optical disk, calculates their content ratios, and determines the suitability of the component composition; and a determination result of the component composition by the image processing device. It is equipped with an output device that outputs.

(Function) The magneto-optical disk quality inspection system of the present invention magnifies and images a predetermined portion of the magneto-optical disk using an electron microscope.
The image data captured by this electron microscope is taken into an image processing device. The image processing device then performs image processing on the captured image data, analyzes the elemental components on the magneto-optical disk, calculates the component content ratio, and determines whether the component composition is appropriate.

The results analyzed and determined by the image processing device in this manner are delivered to the output device and output, and can be provided to inspection workers.

(Example) Hereinafter, embodiments of the present invention will be explained in detail with reference to the drawings.

FIG. 1 shows an embodiment of the present invention, which includes a scanning electron microscope (SEM) 1 that magnifies the surface of a magneto-optical disk by a factor of X5O-X100 and outputs image information; An image processing device 2 that inputs and processes image information, performs component composition analysis on the surface of the magneto-optical disk, determines its suitability, and outputs it, and the type of processing performed on this image processing device 2. a display 3 for displaying a menu screen for specifying a menu, a mouse 4 for clicking an icon while looking at the menu on the display 3, and a printer 5 for printing out the analysis and judgment results of the image processing device 2. We are prepared.

Further, R5 serves as a communication key for giving operation control commands from the image processing device 2 to the electron microscope 1.
-232C cable 6 is provided.

FIG. 2 shows the detailed internal configuration of the image processing device 2, which includes an image data input control section 21 that receives and receives image data from the electron microscope l, an image data memory 22 that stores this image data, and An analysis calculation unit 23 analyzes the image data in the data memory 22 to analyze the compositional components contained in the magneto-optical disk, and further determines the suitability of the composition, and stores the analysis results of the analysis calculation unit 23. and an output control section 25 for outputting the calculation results of the analysis calculation section 23.

It also accepts input from the mouse 4 for clicking an icon while looking at the menu displayed on the screen of the display 3 in order to specify the type of calculation to be performed by the analysis calculation unit 23, and also accepts input from the keyboard 7. an input control unit 26 for receiving and receiving the data; A control section 28 is provided for controlling.

Next, the operation of the magneto-optical disk quality inspection system having the above configuration will be explained.

The magneto-optical disk 9 is made of a synthetic resin matrix 1 as shown in FIG.
A transparent synthetic resin thin film 12 was further formed on the rare earth-transition metal alloy 11 deposited on the surface of alloy 1. When magnified using an electron microscope, alloy 1 was deposited on the surface of alloy 1 as shown in FIG.
Part 1 contains magnetic garnet lla and CO ferrite l.
It can be seen that three elements, lb and polycrystalline film (old Mn, MuPtsb, etc.) 11c, are mixed.

First, the operator sets the magneto-optical disk 9 to be inspected on the stage of the electron microscope 1, and selects a work menu using the mouse 4 while looking at the menu screen displayed on the display 3 connected to the image processing device 2. and click.

Through this operation, a click signal from the mouse 4 is manually input to the control section 28 via the input control section 26.

In response to this input, the electron microscope 1 enlarges and images a predetermined observation region p of the set magneto-optical disk 9, and transmits it as image data to the image processing device 2 side.

The image processing device 2 receives the sent image data in the image data input processing section 21 and stores it in the image memory 22.
The analysis calculation unit 23 then analyzes the component composition of the alloy 11 based on the image data in the image memory 22, measures the area ratio of each of the three elements contained, and stores this as data. The data is stored in the memory 24.

Moreover, when the control unit 28 performs a series of analysis processes in this way,
The SEM control signal output control unit 27 is instructed to specify the coordinate position of the part p2 to be inspected next, and in response to this, the SEM control signal output control unit 27 outputs an inspection part drive command to the drive unit of the electron microscope 1. In response to this, the electron microscope moves the stage so that the specified inspection area is just below the objective lens, and once the position is determined, it again displays the enlarged imaging data of the next inspection area p2 on the magneto-optical disk 9. is transmitted to the image data human control unit 21. And after this,
It is stored in the image memory 22 in the same manner as above, and the three-element magnetic garnet lla, C which is the component composition is stored in the analysis calculation unit 23.
o Ferrite 11b7 polycrystalline film (MuBiMnPtsb
etc.) Find the area ratio of 11C and add this to the data memory 24
Store in.

In this way, the appropriate number of inspections, appropriate inspection sites pl, p2, p3
．． . . . The area ratios of the three elements in the repeated component composition are calculated and calculated, and this is statistically processed.

The results of this statistical processing are then evaluated, and if the area ratio is within the specified tolerance range, it is evaluated as good quality, and if it is not within the tolerance range, it is determined to be poor quality, and this quality judgment result is used again as data. The information is stored in the memory 24 in correspondence with the identification number of the magneto-optical disk 9 to be inspected.

When the test results for a certain period of time are stored in the data memory 24, the test results are outputted from the output control unit 25 in response to an output command from the keyboard 7, or for each predetermined period, or for each number of items tested. Output to printer 5.

'In this way, in the above-described embodiment of the present invention, the quality inspection of the magneto-optical disk can be automatically carried out on the machine side, eliminating the need for the worker to constantly inspect the magneto-optical disk through an electron microscope, thereby reducing the amount of labor required. It is possible to save labor.

[Effects of the Invention] As described above, according to the present invention, the surface of the magneto-optical disk is enlarged and imaged with an electron microscope, the image data is processed by the image processing device, and the image data is contained on the surface of the magneto-optical disk. Since the component composition is determined, its suitability is determined, and output is made, the labor required for quality inspection of magneto-optical disks is significantly reduced compared to the conventional method in which workers inspect the quality of magneto-optical disks by constantly looking through an electron microscope. Moreover, since the quality inspection is automatically performed on the machine side, the quality of the magneto-optical disk can be objectively inspected without subjectivity being involved.

[Brief explanation of the drawing]

FIG. 1 is a system configuration diagram of an embodiment of the present invention, FIG. 2 is a circuit block diagram showing the detailed circuit configuration of the image processing device portion of the above embodiment, and FIG. 3 is a diagram of a general magneto-optical disk. The front view and FIG. 4 are enlarged organization diagrams of the magneto-optical disk imaged using an electron microscope in the above embodiment. 1...Electron microscope 2...Image processing device 3.
...Display 4...Mouse 5...Printer 6...R3-232C cable 7...Keyboard, C 21...Image data input control unit 22...Image memory 23...Analysis calculation unit 24・
...Data memory 25...Output control section 26...
Human power control section 27... Electron microscope control signal output control section 28... Control section

Claims (1)

[Scope of Claims] An electron microscope that magnifies and images a predetermined portion of a magneto-optical disk; and an electron microscope that captures image data from the electron microscope and performs image processing to analyze elemental components on the magneto-optical disk. What is claimed is: 1. A magneto-optical disk quality inspection system comprising: an image processing device that calculates the content ratio of the components and determines the suitability of the component composition; and an output device that outputs the determination result of the component composition of the image processing device.