JPH047872A - Solid-state image sensor - Google Patents

Abstract

PURPOSE:To obtain an excellent image free from irregularities of luminance, irregularities of color, roughness of an image surface, etc., by forming a light shielding pattern of metal in a stripe type. CONSTITUTION:A color filter 15 is arranged for each photo detecting element 11 via an intermediate film 14. A light shielding pattern 13 of metal is formed in a stripe type for each of the photo detecting parts 11, in order to prevent the incidence of light except the light passing the color filter 15 above the photo detecting part. Hence, as compared with the light shielding pattern of a lattice type, the pattern area is reduced, and the light amount of irregular reflection is decreased. Thereby factors generating defects such as irregularities of luminance, irregularities of color, and roughness of an image surface are decreased, and an excellent image can be obtained.

Description

[Detailed description of the invention] [Industrial application field]

The present invention relates to a solid-state image sensor.

[Conventional technology]

FIG. 2 is a sectional view showing an example of a conventional CCD (charge coupled device) color image sensor. This color image sensor has a light receiving section 11 having a photodiode. On the substrate 12 on which il, . Light-shielding pattern I3 with metal such as aluminum in areas except 1
After forming an intermediate film 14 such as acrylic,
Apply gelatin or the like on each of the light receiving sections 11 (R (red), G).
On-chip color filter dyed in (green) or B (blue) color 15. +5. , , and a protective film I6 is further formed thereon. In FIG. 2 above, the interface between the interlayer film I4 and the protective film 16 and the interface between the color filter 15 are drawn as clean straight lines or curved surfaces, but in reality, the interfaces reflect the complex shapes and steps at the bottom. has a complex shape. Therefore, the light receiving part l! The light incident from above is refracted at the interface between the intermediate film 14 and the protective film 16 and the interface between the color filter I5, propagates in various directions, and enters the adjacent light receiving sections 11.
The image may be blurry or the colors may be off. The light-shielding pattern 13 is for preventing light from entering the adjacent area, and is formed in a lattice shape as shown in FIG. 3. That is, each light receiving section 11.11. By covering all areas other than the non-shading area 17.17° above , , each light receiving section 11 has a color filter 1 above it.
The purpose is to allow only the light that has passed through 5 to enter, thereby obtaining an accurate video signal.

[Problem to be solved by the invention]

However, in the conventional light shielding putter 7, when the reflectance of the light shielding film 13 made of metal such as aluminum is high, the amount of incident light is reflected, and the shape of the light shielding film 13 is complicated. Therefore, as shown in FIG. 4, the direction of the reflected light is not determined and it is reflected diffusely. Therefore, there is a problem in that defects such as uneven brightness, uneven color, and roughness of the screen occur in the image. SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a solid-state image sensor that has a light-shielding pattern that reduces the amount of diffusely reflected light and can obtain good images.

[Means to solve the problem]

In order to achieve the above object, the present invention provides a substrate on which a plurality of light receiving parts are formed, one color filter is disposed for each of the light receiving parts via an interlayer film, and a color filter is disposed for each of the light receiving parts via an intermediate film. In a solid-state image sensor in which a metal light-shielding pattern is formed to prevent one light from passing through a color filter above the light-receiving part and entering, the light-shielding pattern is formed in a stripe shape. It is characterized by the fact that

[Effect]

Since the light-shielding pattern is formed in a stripe shape, the area of the pattern is smaller than in the case of a grid-like light-shielding pattern, and the amount of diffusely reflected light is reduced. Therefore, factors that cause defects such as brightness unevenness, color unevenness, and screen roughness in the image are reduced, and a good image can be obtained.

【Example】

The present invention will be explained below based on the illustrated embodiments. FIG. 1 is a plan view showing a pattern of a light-shielding film of a solid-state image sensor according to an embodiment of the present invention. This solid-state image sensor is the same as the conventional solid-state image sensor shown in FIG. 2, except that the light shielding film 3 is formed in a stripe shape. As shown in FIG. 1, when the light shielding film is formed into a stripe shape, the area of the pattern is reduced compared to when it is formed into a lattice shape as shown in FIG. Therefore, the amount of light that is diffusely reflected by this light-shielding film and enters the photodiode of the light receiving section is reduced. That is, the factors that cause defects such as uneven brightness, uneven color, and roughness of the image in the image are reduced. In experiments, it has been confirmed that while the number of defective products in the conventional example was several percent of IO, the number of defective products in the unexamined example was reduced to several percent or less.

【Effect of the invention】

As is clear from the above, the solid-state image sensor of the present invention is
A metal for preventing light from being extracted after passing through a color filter disposed on each of the light receiving parts on a substrate having a plurality of light receiving parts via an interlayer film from entering the light receiving part. The light-shielding pattern is formed into stripes, so
It is possible to obtain a good image without uneven brightness, uneven color, or roughness on the screen.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing a light-shielding pattern in an embodiment of the solid-state image sensor of the present invention, FIG. 2 is a cross-sectional view of a conventional solid-state image sensor, and FIG. 3 is a plan view showing a light-shielding pattern in the above-mentioned conventional example. FIG. 4 is a diagram illustrating that incident light is diffusely reflected by the light shielding pattern in the conventional example. 3... Striped light shielding pattern, 11... Light receiving section, 12... Substrate, 13... Grid shaped light shielding pattern, 14... Intermediate film,
15... On-chip color filter, 16. Protective film,
17...Non-shading area.

Claims (1)

[Claims] (1) On a substrate on which a plurality of light receiving parts are formed, one color filter is provided for each of the light receiving parts via an interlayer film, and a color filter above the light receiving part is provided for each of the light receiving parts. What is claimed is: 1. A solid-state image sensor having a metal light-shielding pattern formed thereon to prevent light other than light that has passed through from entering the solid-state image sensor, characterized in that the light-shielding pattern is formed in a stripe shape.