JPH0478267U - - Google Patents
Info
- Publication number
- JPH0478267U JPH0478267U JP12266290U JP12266290U JPH0478267U JP H0478267 U JPH0478267 U JP H0478267U JP 12266290 U JP12266290 U JP 12266290U JP 12266290 U JP12266290 U JP 12266290U JP H0478267 U JPH0478267 U JP H0478267U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- pattern
- photomask
- etching
- aperture plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000010030 laminating Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12266290U JPH0478267U (cs) | 1990-11-22 | 1990-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12266290U JPH0478267U (cs) | 1990-11-22 | 1990-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0478267U true JPH0478267U (cs) | 1992-07-08 |
Family
ID=31870423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12266290U Pending JPH0478267U (cs) | 1990-11-22 | 1990-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0478267U (cs) |
-
1990
- 1990-11-22 JP JP12266290U patent/JPH0478267U/ja active Pending
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