JPH0478263U - - Google Patents
Info
- Publication number
- JPH0478263U JPH0478263U JP12057490U JP12057490U JPH0478263U JP H0478263 U JPH0478263 U JP H0478263U JP 12057490 U JP12057490 U JP 12057490U JP 12057490 U JP12057490 U JP 12057490U JP H0478263 U JPH0478263 U JP H0478263U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- vapor deposition
- vapor
- thin film
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 230000009257 reactivity Effects 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12057490U JPH0478263U (ar) | 1990-11-15 | 1990-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12057490U JPH0478263U (ar) | 1990-11-15 | 1990-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0478263U true JPH0478263U (ar) | 1992-07-08 |
Family
ID=31868473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12057490U Pending JPH0478263U (ar) | 1990-11-15 | 1990-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0478263U (ar) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016160481A (ja) * | 2015-02-28 | 2016-09-05 | 国立大学法人 奈良先端科学技術大学院大学 | 蒸着セル、薄膜作製装置および薄膜作製方法 |
-
1990
- 1990-11-15 JP JP12057490U patent/JPH0478263U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016160481A (ja) * | 2015-02-28 | 2016-09-05 | 国立大学法人 奈良先端科学技術大学院大学 | 蒸着セル、薄膜作製装置および薄膜作製方法 |