JPH0477254U - - Google Patents
Info
- Publication number
- JPH0477254U JPH0477254U JP12031390U JP12031390U JPH0477254U JP H0477254 U JPH0477254 U JP H0477254U JP 12031390 U JP12031390 U JP 12031390U JP 12031390 U JP12031390 U JP 12031390U JP H0477254 U JPH0477254 U JP H0477254U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- guide
- supporter
- slidable
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12031390U JPH0477254U (de) | 1990-11-19 | 1990-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12031390U JPH0477254U (de) | 1990-11-19 | 1990-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0477254U true JPH0477254U (de) | 1992-07-06 |
Family
ID=31868224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12031390U Pending JPH0477254U (de) | 1990-11-19 | 1990-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0477254U (de) |
-
1990
- 1990-11-19 JP JP12031390U patent/JPH0477254U/ja active Pending