JPH0476560B2 - - Google Patents
Info
- Publication number
- JPH0476560B2 JPH0476560B2 JP61127335A JP12733586A JPH0476560B2 JP H0476560 B2 JPH0476560 B2 JP H0476560B2 JP 61127335 A JP61127335 A JP 61127335A JP 12733586 A JP12733586 A JP 12733586A JP H0476560 B2 JPH0476560 B2 JP H0476560B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- vibrating body
- ultrasonic
- ultrasonic transducer
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005530 etching Methods 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 239000010408 film Substances 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 17
- 229910052710 silicon Inorganic materials 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 12
- 229920006267 polyester film Polymers 0.000 description 11
- 230000010355 oscillation Effects 0.000 description 9
- 229910000838 Al alloy Inorganic materials 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 7
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 229920000728 polyester Polymers 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 238000001444 catalytic combustion detection Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12733586A JPS62284600A (ja) | 1986-06-03 | 1986-06-03 | 超音波トランスジューサの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12733586A JPS62284600A (ja) | 1986-06-03 | 1986-06-03 | 超音波トランスジューサの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62284600A JPS62284600A (ja) | 1987-12-10 |
| JPH0476560B2 true JPH0476560B2 (zh) | 1992-12-03 |
Family
ID=14957376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12733586A Granted JPS62284600A (ja) | 1986-06-03 | 1986-06-03 | 超音波トランスジューサの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62284600A (zh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9815992D0 (en) * | 1998-07-23 | 1998-09-23 | Secr Defence | Improvements in and relating to microchemical devices |
| JP2006105887A (ja) * | 2004-10-08 | 2006-04-20 | Synthesis Corp | 立体視装置およびそれを備えた立体画像表示システム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61220599A (ja) * | 1985-03-26 | 1986-09-30 | Nec Corp | 超音波センサ |
-
1986
- 1986-06-03 JP JP12733586A patent/JPS62284600A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61220599A (ja) * | 1985-03-26 | 1986-09-30 | Nec Corp | 超音波センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62284600A (ja) | 1987-12-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |