JPH0475931U - - Google Patents

Info

Publication number

JPH0475931U

JPH0475931U JP11954690U JP11954690U JPH0475931U JP H0475931 U JPH0475931 U JP H0475931U JP 11954690 U JP11954690 U JP 11954690U JP 11954690 U JP11954690 U JP 11954690U JP H0475931 U JPH0475931 U JP H0475931U

Authority

JP

Japan

Prior art keywords

force sensor

input shaft

diffusion

strain body

bonding

Prior art date

1990-11-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000853 adhesive Substances 0.000 claims description 2
• 230000001070 adhesive effect Effects 0.000 claims description 2
• 238000009792 diffusion process Methods 0.000 claims 3
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
• 239000013078 crystal Substances 0.000 claims 1
• 238000001514 detection method Methods 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• 239000000758 substrate Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3

Cited By (3)