JPH0474592B2 - - Google Patents
Info
- Publication number
- JPH0474592B2 JPH0474592B2 JP59244347A JP24434784A JPH0474592B2 JP H0474592 B2 JPH0474592 B2 JP H0474592B2 JP 59244347 A JP59244347 A JP 59244347A JP 24434784 A JP24434784 A JP 24434784A JP H0474592 B2 JPH0474592 B2 JP H0474592B2
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- annular
- thin plate
- gate valve
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Sliding Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24434784A JPS61124778A (ja) | 1984-11-21 | 1984-11-21 | 真空用バルブのシ−ル方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24434784A JPS61124778A (ja) | 1984-11-21 | 1984-11-21 | 真空用バルブのシ−ル方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61124778A JPS61124778A (ja) | 1986-06-12 |
| JPH0474592B2 true JPH0474592B2 (cs) | 1992-11-26 |
Family
ID=17117345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24434784A Granted JPS61124778A (ja) | 1984-11-21 | 1984-11-21 | 真空用バルブのシ−ル方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61124778A (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101650320B1 (ko) * | 2008-08-28 | 2016-08-23 | 어플라이드 머티어리얼스, 인코포레이티드 | 오링을 이동하는 대응 부분에 커플링시키기 위한 슬롯이 형성된 tssl 도어 |
| KR101425811B1 (ko) * | 2013-02-15 | 2014-08-05 | (주)시스콤 | 고속 압력제어와 파티클 발생을 극소화한 구조를 지닌 역압대응 진자식 게이트 밸브 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57114065A (en) * | 1980-12-29 | 1982-07-15 | Osaka Shinku Kiki Seisakusho:Kk | Gate valve |
-
1984
- 1984-11-21 JP JP24434784A patent/JPS61124778A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61124778A (ja) | 1986-06-12 |
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