JPH0474555B2 - - Google Patents

Info

Publication number
JPH0474555B2
JPH0474555B2 JP61043823A JP4382386A JPH0474555B2 JP H0474555 B2 JPH0474555 B2 JP H0474555B2 JP 61043823 A JP61043823 A JP 61043823A JP 4382386 A JP4382386 A JP 4382386A JP H0474555 B2 JPH0474555 B2 JP H0474555B2
Authority
JP
Japan
Prior art keywords
temperature
chevron
gas
cryopanel
batsuful
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61043823A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62203981A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4382386A priority Critical patent/JPS62203981A/ja
Publication of JPS62203981A publication Critical patent/JPS62203981A/ja
Publication of JPH0474555B2 publication Critical patent/JPH0474555B2/ja
Granted legal-status Critical Current

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Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP4382386A 1986-02-28 1986-02-28 凝縮させるべき気体をクライオポンプのクライオパネルにのみ凝縮させる方法 Granted JPS62203981A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4382386A JPS62203981A (ja) 1986-02-28 1986-02-28 凝縮させるべき気体をクライオポンプのクライオパネルにのみ凝縮させる方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4382386A JPS62203981A (ja) 1986-02-28 1986-02-28 凝縮させるべき気体をクライオポンプのクライオパネルにのみ凝縮させる方法

Publications (2)

Publication Number Publication Date
JPS62203981A JPS62203981A (ja) 1987-09-08
JPH0474555B2 true JPH0474555B2 (cg-RX-API-DMAC7.html) 1992-11-26

Family

ID=12674467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4382386A Granted JPS62203981A (ja) 1986-02-28 1986-02-28 凝縮させるべき気体をクライオポンプのクライオパネルにのみ凝縮させる方法

Country Status (1)

Country Link
JP (1) JPS62203981A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6053551B2 (ja) 2013-02-18 2016-12-27 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの運転方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4546613A (en) * 1983-04-04 1985-10-15 Helix Technology Corporation Cryopump with rapid cooldown and increased pressure

Also Published As

Publication number Publication date
JPS62203981A (ja) 1987-09-08

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