JPH0474538U - - Google Patents
Info
- Publication number
- JPH0474538U JPH0474538U JP11720890U JP11720890U JPH0474538U JP H0474538 U JPH0474538 U JP H0474538U JP 11720890 U JP11720890 U JP 11720890U JP 11720890 U JP11720890 U JP 11720890U JP H0474538 U JPH0474538 U JP H0474538U
- Authority
- JP
- Japan
- Prior art keywords
- gas introduction
- vaporization
- vaporization section
- phase chemical
- introduction pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11720890U JP2533811Y2 (ja) | 1990-11-09 | 1990-11-09 | 微粉、超微粉製造用気相化学反応装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11720890U JP2533811Y2 (ja) | 1990-11-09 | 1990-11-09 | 微粉、超微粉製造用気相化学反応装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0474538U true JPH0474538U (cs) | 1992-06-30 |
| JP2533811Y2 JP2533811Y2 (ja) | 1997-04-23 |
Family
ID=31865090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11720890U Expired - Fee Related JP2533811Y2 (ja) | 1990-11-09 | 1990-11-09 | 微粉、超微粉製造用気相化学反応装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2533811Y2 (cs) |
-
1990
- 1990-11-09 JP JP11720890U patent/JP2533811Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2533811Y2 (ja) | 1997-04-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |