JPH0470279U - - Google Patents

Info

Publication number
JPH0470279U
JPH0470279U JP11142190U JP11142190U JPH0470279U JP H0470279 U JPH0470279 U JP H0470279U JP 11142190 U JP11142190 U JP 11142190U JP 11142190 U JP11142190 U JP 11142190U JP H0470279 U JPH0470279 U JP H0470279U
Authority
JP
Japan
Prior art keywords
heavy
order
focusing
ion source
electrostatic accelerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11142190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11142190U priority Critical patent/JPH0470279U/ja
Publication of JPH0470279U publication Critical patent/JPH0470279U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP11142190U 1990-10-24 1990-10-24 Pending JPH0470279U (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11142190U JPH0470279U (ru) 1990-10-24 1990-10-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11142190U JPH0470279U (ru) 1990-10-24 1990-10-24

Publications (1)

Publication Number Publication Date
JPH0470279U true JPH0470279U (ru) 1992-06-22

Family

ID=31858872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11142190U Pending JPH0470279U (ru) 1990-10-24 1990-10-24

Country Status (1)

Country Link
JP (1) JPH0470279U (ru)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06126469A (ja) * 1992-10-22 1994-05-10 Agency Of Ind Science & Technol 表面加工方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6459933A (en) * 1987-08-31 1989-03-07 Hitachi Ltd Semiconductor device, and method and device for ion beam processing for production thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6459933A (en) * 1987-08-31 1989-03-07 Hitachi Ltd Semiconductor device, and method and device for ion beam processing for production thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06126469A (ja) * 1992-10-22 1994-05-10 Agency Of Ind Science & Technol 表面加工方法

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