JPH0470279U - - Google Patents
Info
- Publication number
- JPH0470279U JPH0470279U JP11142190U JP11142190U JPH0470279U JP H0470279 U JPH0470279 U JP H0470279U JP 11142190 U JP11142190 U JP 11142190U JP 11142190 U JP11142190 U JP 11142190U JP H0470279 U JPH0470279 U JP H0470279U
- Authority
- JP
- Japan
- Prior art keywords
- heavy
- order
- focusing
- ion source
- electrostatic accelerator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 3
- 238000010884 ion-beam technique Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11142190U JPH0470279U (ru) | 1990-10-24 | 1990-10-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11142190U JPH0470279U (ru) | 1990-10-24 | 1990-10-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0470279U true JPH0470279U (ru) | 1992-06-22 |
Family
ID=31858872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11142190U Pending JPH0470279U (ru) | 1990-10-24 | 1990-10-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0470279U (ru) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06126469A (ja) * | 1992-10-22 | 1994-05-10 | Agency Of Ind Science & Technol | 表面加工方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6459933A (en) * | 1987-08-31 | 1989-03-07 | Hitachi Ltd | Semiconductor device, and method and device for ion beam processing for production thereof |
-
1990
- 1990-10-24 JP JP11142190U patent/JPH0470279U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6459933A (en) * | 1987-08-31 | 1989-03-07 | Hitachi Ltd | Semiconductor device, and method and device for ion beam processing for production thereof |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06126469A (ja) * | 1992-10-22 | 1994-05-10 | Agency Of Ind Science & Technol | 表面加工方法 |
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