JPH0469322B2 - - Google Patents
Info
- Publication number
- JPH0469322B2 JPH0469322B2 JP16761683A JP16761683A JPH0469322B2 JP H0469322 B2 JPH0469322 B2 JP H0469322B2 JP 16761683 A JP16761683 A JP 16761683A JP 16761683 A JP16761683 A JP 16761683A JP H0469322 B2 JPH0469322 B2 JP H0469322B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- inspected
- data
- dimensional
- pixel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000013461 design Methods 0.000 claims description 30
- 238000007689 inspection Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 18
- 238000012795 verification Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 230000007547 defect Effects 0.000 description 7
- 238000012360 testing method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58167616A JPS6060504A (ja) | 1983-09-13 | 1983-09-13 | パタ−ン検査方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58167616A JPS6060504A (ja) | 1983-09-13 | 1983-09-13 | パタ−ン検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6060504A JPS6060504A (ja) | 1985-04-08 |
| JPH0469322B2 true JPH0469322B2 (cg-RX-API-DMAC7.html) | 1992-11-05 |
Family
ID=15853083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58167616A Granted JPS6060504A (ja) | 1983-09-13 | 1983-09-13 | パタ−ン検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6060504A (cg-RX-API-DMAC7.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0797023B2 (ja) * | 1985-11-27 | 1995-10-18 | 株式会社アステムエンジニアリング | 物体の良否判定装置 |
-
1983
- 1983-09-13 JP JP58167616A patent/JPS6060504A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6060504A (ja) | 1985-04-08 |
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