JPH0468576B2 - - Google Patents

Info

Publication number
JPH0468576B2
JPH0468576B2 JP16617887A JP16617887A JPH0468576B2 JP H0468576 B2 JPH0468576 B2 JP H0468576B2 JP 16617887 A JP16617887 A JP 16617887A JP 16617887 A JP16617887 A JP 16617887A JP H0468576 B2 JPH0468576 B2 JP H0468576B2
Authority
JP
Japan
Prior art keywords
capsule
pressure
vibrating beam
epitaxial layer
silicon substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16617887A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6410141A (en
Inventor
Kyoichi Ikeda
Kinji Harada
Sunao Nishikawa
Takashi Yoshida
Hideki Kuwayama
Takashi Kobayashi
Tetsuya Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP16617887A priority Critical patent/JPS6410141A/ja
Publication of JPS6410141A publication Critical patent/JPS6410141A/ja
Publication of JPH0468576B2 publication Critical patent/JPH0468576B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP16617887A 1987-07-02 1987-07-02 Pressure sensor Granted JPS6410141A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16617887A JPS6410141A (en) 1987-07-02 1987-07-02 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16617887A JPS6410141A (en) 1987-07-02 1987-07-02 Pressure sensor

Publications (2)

Publication Number Publication Date
JPS6410141A JPS6410141A (en) 1989-01-13
JPH0468576B2 true JPH0468576B2 (en:Method) 1992-11-02

Family

ID=15826524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16617887A Granted JPS6410141A (en) 1987-07-02 1987-07-02 Pressure sensor

Country Status (1)

Country Link
JP (1) JPS6410141A (en:Method)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9524624D0 (en) * 1995-12-01 1996-01-31 Weston Aerospace Ltd Pressure sensor
JP4804798B2 (ja) * 2005-05-27 2011-11-02 横河電機株式会社 圧力検出器及び圧力検出器の詰まり診断方法
JP5656070B2 (ja) * 2010-12-22 2015-01-21 横河電機株式会社 振動式絶対圧トランスデューサ
JP2012150029A (ja) * 2011-01-20 2012-08-09 Yokogawa Electric Corp 振動式トランスデューサおよび振動式トランスデューサの製造方法

Also Published As

Publication number Publication date
JPS6410141A (en) 1989-01-13

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees