JPH0466550U - - Google Patents

Info

Publication number

JPH0466550U

JPH0466550U JP10934290U JP10934290U JPH0466550U JP H0466550 U JPH0466550 U JP H0466550U JP 10934290 U JP10934290 U JP 10934290U JP 10934290 U JP10934290 U JP 10934290U JP H0466550 U JPH0466550 U JP H0466550U

Authority

JP

Japan

Prior art keywords

substrate

recess

chamber

outside

communicating

Prior art date

1990-10-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 8
• 229910052710 silicon Inorganic materials 0.000 claims description 5
• 239000010703 silicon Substances 0.000 claims description 5
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
• 239000011521 glass Substances 0.000 claims 2
• 239000000463 material Substances 0.000 claims 2
• 238000000034 method Methods 0.000 claims 1
• 238000007789 sealing Methods 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4