JPH0461145A - Test equipment for semiconductor - Google Patents

Abstract

PURPOSE:To conduct a test efficiently by rearranging a test program so that the test is executed successively from test items having larger defective number when the defective number of a specific test item reaches a set defective number. CONSTITUTION:A system controller 1 controlling the whole operation, a test program storage unit 2, an order variation unit 7, an execution program storage unit 8, a test unit 4 transmitting an input signal over an element 5 to be measured and deciding a measuring data, an execution control unit 3 reading a command stored in the execution program storage unit 8 and setting a data to the test unit 4, a result storage unit 6 and a defective-number counter for every item 9 are provided. The execution control unit 3 reads the command from the execution program unit 8, and transmits a set data over the test unit 4. The test unit 4 prepares the input signal sent to the element to be measured 5 by the set data from the execution control unit 3, measures an output signal from the element to be measured 5, and decides a measuring data. Accordingly, the test time is shortened, thus efficiently allowing a test.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a semiconductor testing device used in a semiconductor device testing process.

[Conventional technology]

FIG. 3 is a block system diagram showing the configuration of a conventional semiconductor testing device. In the figure, 1 is a system controller that controls the semiconductor test equipment, 2 is a test program storage unit that stores test programs, and 3 reads instructions from the test program storage unit 2.
The execution control unit 4 sends data to the test unit node 4, which will be described later, creates an input signal to be given to the device under test 5 based on the setting data from the execution control unit 3, and measures the output signal from the device under test 5. , a test unit for determining measurement data, and 6 a result storage unit for storing the results determined by the test unit 4.

Next, the operation will be explained using FIGS. 3 and 4.

First, a test program necessary for testing the device under test 5 with the semiconductor testing apparatus is loaded into the test program storage unit 2 by the system controller 1 (step 11).

Next, the system controller 1 performs data processing settings for outputting necessary data at the end of the test to the result storage unit 6 (step 12).

Next, the execution control unit 3 is activated by the system controller 1 (step 13>).

Next, the execution control unit 3 reads data necessary for testing one test item from the test program storage unit 2 (step 14).

Next, the execution control unit 3 decodes the read data and transfers the measurement conditions and judgment values to the test unit 4 (step 15).

Next, the test unit 4 manually applies a signal to the device under test 5, measures the output from the device under test 5, and determines the measurement data (step 16).

Next, the test unit 4 transfers the determination result to the execution control unit 3 (step 17). Also, the judgment results and measurement data are transferred to the result storage unit 6 (step 1
8).

Next, if the determination result is a non-defective product, it is determined whether the tested test item is the last test item (step 19.20). If it is the last test item, the test of the next device under test is started (step 20.13), and if it is not the last test item, the next test is performed (step 20.14>).

Next, if the determination result is negative, the execution control unit 3 stops execution of the test (step 21).

Next, it is determined whether the device to be measured 5 that is currently being measured is the device to be measured that is the last device to be measured (step 22
). If it is the last device to be measured, the system controller 1 reads the data from the result storage unit 6. This data is output as a result according to the data processing settings set at the start of the test by the system controller 1, and is processed in the inspection process. The process ends (step 23). If it is not the last device to be measured, testing of the next device to be measured is started (step 22.13).

(Problem to be Solved by the Invention) Since the conventional semiconductor test equipment is configured as described above, the execution order of the test items cannot be changed. Therefore, in the test of a specific loft, the test items that become defective are There was a problem in which the test could not be executed efficiently if it occurred at the end of the test program.

This is because a defective device to be measured can be tested more efficiently if it is determined to be defective as soon as possible.

The present invention has been made in view of these points, and its purpose is to improve the efficiency of testing by executing tests in order of the number of defective items (rate) among the test items. The object of the present invention is to obtain a semiconductor testing device that can perform a semiconductor test.

[Means to solve the problem]

In order to achieve such an object, the present invention includes a system controller that controls the overall operation, a test program storage unit that stores the test program necessary to execute the test of the device under test, and a system controller that controls the overall operation. an order change unit that rearranges the execution order; an execution program storage unit that stores the rearranged test programs; a test unit that applies input signals to the device under test, measures output, and judges measured data; An execution control unit that reads instructions stored in the execution program storage unit and sets data in the test unit, a result storage unit that stores test results for each test item, and an item-specific unit that counts the number of defects for each test item. A defect number counter is also provided.

[Effect]

The order changing unit constituting the semiconductor testing device according to the present invention always counts the number of defects (number of defects for each item) of the Illth (test item with the highest number of defects within a certain period of time) (usually a test item with the most defects within a certain period of time). ) is counting the number of defects in
When the set number of defects is reached, the test programs are rearranged so that tests are executed in descending order of the number of defects.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a block system diagram showing an embodiment of a semiconductor testing apparatus according to the present invention. In the same figure, "OI is a system controller that controls the semiconductor test equipment, 2 is a test program storage unit, 3 is an execution l#Im unit, 4 is a test unit, 5 is a device under test, and 6 is determined by test unit 4. 7 is an order change unit for changing the execution order of the test items; 8 is an execution program storage unit for storing the test program whose execution order of the test items has been changed by the order change unit 7; Reference numeral 9 denotes a per-item failure number counter that counts the number of failures for each test item.The execution control unit 3 reads instructions from the execution program unit 8 and sends setting data to the test unit 4.The test unit 4 Based on the setting data from the unit 3, an input signal to be applied to the device under test 5 is created, an output signal from the device under test 5 is measured, and the measured data is determined.

Next, the operation will be explained using FIGS. 1 and 2.

First, the system controller 1 loads a test program necessary for testing the device under test 5 with the semiconductor test equipment into the test program storage unit 2 and the execution program storage unit 8 (step 31). Next, the system controller J controls the order change unit 7
For , set the order change conditions (conditions for rearranging the eggplant program), reset the counter for each item defect number counter 9, and reset the counter for the result storage unit 6 at the end of the test. Each data processing setting is made to output the necessary data (step 32).

Next, the execution control unit 3 is activated by the system controller 1 (step 33).

Next, the execution control unit 3 includes an execution program storage unit,
Data necessary for testing one test item is read from the unit 8 (step 34).

Next, the execution control unit 3 decodes the read data and sets the measurement conditions and judgment values in the test unit 4 (step 35).6 Next, the test unit 4 sends a signal to the device under test 5. The output from the device under test 5 is measured 7, and the measured data is determined (step 36).

Next, the test unit 4 transfers the determination result to the execution control unit 3 (step 37). Also, the judgment results and measurement data are transferred to the result storage unit 6 (step 3
Day).

Next, if the judgment result is a non-defective item, it is judged whether the test that made the judgment is the last test item (step 39).
, 4O). If it is the last test item, the test of the next device under test is started (step 40.33), and if it is not the last test item, the next test is performed (step 40.34).

Next, if the judgment result is defective, the counter of the defective test item in the defective number counter for each item 9 is incremented (
Step 41), and the execution control unit 3 stops the test execution (Step 42).

Next, the order change unit 7 outputs a defect count counter 9 for each item.
It is checked whether the contents match the order change conditions (step 43). If the order change condition is satisfied, the test items are rearranged so that the tests are executed in the order of the test items with the highest number of defects (step 44). The rearranged test programs are stored in the execution program storage unit 8 (step 45). Further, unless the order change condition is met, the test items are not rearranged.

Next, it is determined whether the device to be measured 5 currently being measured is the last device to be measured (step 46).

If it is the last device to be measured, the system controller 1 reads the data from the result storage unit 6. This data is output by the system controller 1 according to the data processing settings set at the start of the test.
The processing in the inspection process ends (step 47). Also,
If it is not the last device to be measured, the next device to be measured is tested (step 46.33).

Note that in the above embodiment, the execution program storage unit 8
stores all 11 grams of sorted test blocks.
Even if it is not necessary, a configuration may be adopted in which only the order of test l execution can be instructed.

〔Effect of the invention〕

According to the above description and item 7, according to the present invention. Since test items that often cause defects can be rearranged and tested so that they can be tested at the beginning, the test time for defective semiconductor devices can be shortened and tests can be carried out efficiently.

[Brief explanation of the drawing]

FIG. 1 is a block system diagram showing an embodiment of the semiconductor testing device according to the present invention, FIG. 2 is a flow chart for explaining the operation of the device shown in FIG. 3, and FIG. 3 is a diagram showing a conventional semiconductor testing device. The block system diagram, FIG. 4, is a flowchart for explaining the operation of the apparatus shown in FIG. DESCRIPTION OF SYMBOLS 1... System controller, 2... Test program storage unit, unit, 3... Execution control unit, 4...
...Test unit, 5...Device under test, 6...Result storage unit, 7...Order change unit, 8...
Execution program storage unit; 9. Defective number counter for each item. Figure 1 Figure 3

Claims (1)

[Claims] The system controller has been rearranged to include a system controller that controls the overall operation, a test program storage unit that stores the test programs necessary to test the device under test, and an order change unit that rearranges the execution order of test items. Applying input signals to the execution program storage unit that stores the test program and the device under test,
A test unit that measures the output and judges the measured data, an execution control unit that reads instructions stored in the execution program storage unit and sets data in the test unit, and a result that stores the test results for each test item. A semiconductor testing device that includes a storage unit and an item-by-item failure number counter that counts the number of failures for each test item.