JPH0460542U - - Google Patents
Info
- Publication number
- JPH0460542U JPH0460542U JP10162890U JP10162890U JPH0460542U JP H0460542 U JPH0460542 U JP H0460542U JP 10162890 U JP10162890 U JP 10162890U JP 10162890 U JP10162890 U JP 10162890U JP H0460542 U JPH0460542 U JP H0460542U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- plasma processing
- vacuum
- kept
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10162890U JPH0460542U (enExample) | 1990-09-29 | 1990-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10162890U JPH0460542U (enExample) | 1990-09-29 | 1990-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0460542U true JPH0460542U (enExample) | 1992-05-25 |
Family
ID=31845253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10162890U Pending JPH0460542U (enExample) | 1990-09-29 | 1990-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0460542U (enExample) |
-
1990
- 1990-09-29 JP JP10162890U patent/JPH0460542U/ja active Pending
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