JPH02106824U - - Google Patents
Info
- Publication number
- JPH02106824U JPH02106824U JP1989016053U JP1605389U JPH02106824U JP H02106824 U JPH02106824 U JP H02106824U JP 1989016053 U JP1989016053 U JP 1989016053U JP 1605389 U JP1605389 U JP 1605389U JP H02106824 U JPH02106824 U JP H02106824U
- Authority
- JP
- Japan
- Prior art keywords
- plasma generation
- tube
- plasma
- microwave
- oscillation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989016053U JPH02106824U (enExample) | 1989-02-14 | 1989-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989016053U JPH02106824U (enExample) | 1989-02-14 | 1989-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02106824U true JPH02106824U (enExample) | 1990-08-24 |
Family
ID=31228647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989016053U Pending JPH02106824U (enExample) | 1989-02-14 | 1989-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02106824U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003052807A1 (en) * | 2001-12-14 | 2003-06-26 | Tokyo Electron Limited | Plasma processor |
-
1989
- 1989-02-14 JP JP1989016053U patent/JPH02106824U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003052807A1 (en) * | 2001-12-14 | 2003-06-26 | Tokyo Electron Limited | Plasma processor |