JPH0460539B2 - - Google Patents
Info
- Publication number
- JPH0460539B2 JPH0460539B2 JP60073656A JP7365685A JPH0460539B2 JP H0460539 B2 JPH0460539 B2 JP H0460539B2 JP 60073656 A JP60073656 A JP 60073656A JP 7365685 A JP7365685 A JP 7365685A JP H0460539 B2 JPH0460539 B2 JP H0460539B2
- Authority
- JP
- Japan
- Prior art keywords
- panel
- cryopump
- leak detection
- detection device
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007789 gas Substances 0.000 claims description 71
- 238000001514 detection method Methods 0.000 claims description 48
- 229910052734 helium Inorganic materials 0.000 claims description 46
- 239000001307 helium Substances 0.000 claims description 46
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 46
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 28
- 239000000700 radioactive tracer Substances 0.000 claims description 25
- 238000010792 warming Methods 0.000 claims description 20
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 14
- 229910052757 nitrogen Inorganic materials 0.000 claims description 14
- 238000012360 testing method Methods 0.000 claims description 14
- 239000003463 adsorbent Substances 0.000 claims description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 10
- 239000001257 hydrogen Substances 0.000 claims description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims description 9
- 230000035945 sensitivity Effects 0.000 claims description 9
- 238000005057 refrigeration Methods 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 239000001569 carbon dioxide Substances 0.000 claims description 7
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 229910052754 neon Inorganic materials 0.000 claims description 6
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 5
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 5
- 238000001179 sorption measurement Methods 0.000 claims description 5
- 238000007710 freezing Methods 0.000 claims description 4
- 230000008014 freezing Effects 0.000 claims description 4
- 150000008282 halocarbons Chemical class 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 150000002431 hydrogen Chemical class 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims 3
- 230000001186 cumulative effect Effects 0.000 claims 1
- 238000003795 desorption Methods 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 20
- 238000005086 pumping Methods 0.000 description 14
- 239000003610 charcoal Substances 0.000 description 8
- 239000007788 liquid Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000000523 sample Substances 0.000 description 6
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 230000005686 electrostatic field Effects 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- -1 carbon halides Chemical class 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US598622 | 1984-04-10 | ||
| US06/598,622 US4593530A (en) | 1984-04-10 | 1984-04-10 | Method and apparatus for improving the sensitivity of a leak detector utilizing a cryopump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60230029A JPS60230029A (ja) | 1985-11-15 |
| JPH0460539B2 true JPH0460539B2 (fr) | 1992-09-28 |
Family
ID=24396303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60073656A Granted JPS60230029A (ja) | 1984-04-10 | 1985-04-09 | クライオポンプを備えた漏洩検出装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US4593530A (fr) |
| EP (1) | EP0158295A3 (fr) |
| JP (1) | JPS60230029A (fr) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4608866A (en) * | 1985-03-13 | 1986-09-02 | Martin Marietta Corporation | Small component helium leak detector |
| GB8526191D0 (en) * | 1985-10-23 | 1985-11-27 | Boc Group Plc | Cryopumps |
| US4785666A (en) * | 1986-12-19 | 1988-11-22 | Martin Marietta Corporation | Method of increasing the sensitivity of a leak detector in the probe mode |
| US4896511A (en) * | 1987-01-27 | 1990-01-30 | Lessard Philip A | Optimally staged cryopump |
| WO1988005500A1 (fr) * | 1987-01-27 | 1988-07-28 | Helix Technology Corporation | Cryopompe a etagement optimal |
| US5001903A (en) * | 1987-01-27 | 1991-03-26 | Helix Technology Corporation | Optimally staged cryopump |
| CA2096419A1 (fr) * | 1990-11-19 | 1992-05-20 | Gerd Flick | Procede de regeneration d'une cryopompe et cryopompe pour appliquer le procede |
| US5343740A (en) * | 1993-08-27 | 1994-09-06 | Southeastern Universities Research Association | High sensitivity leak detection method and apparatus |
| DE9405028U1 (de) * | 1994-03-24 | 1994-06-09 | Leybold Ag | Testgas-Lecksuchgerät |
| US5501080A (en) * | 1994-12-14 | 1996-03-26 | Lockheed Idaho Technologies Company | Self-contained cryogenic gas sampling apparatus and method |
| US5855118A (en) * | 1996-03-26 | 1999-01-05 | Saes Pure Gas, Inc. | Combination cryopump/getter pump and method for regenerating same |
| US6659730B2 (en) * | 1997-11-07 | 2003-12-09 | Westport Research Inc. | High pressure pump system for supplying a cryogenic fluid from a storage tank |
| JP3643474B2 (ja) * | 1998-01-30 | 2005-04-27 | 株式会社東芝 | 半導体処理システム及び半導体処理システムの使用方法 |
| FR2784184B1 (fr) | 1998-10-01 | 2000-12-15 | Cit Alcatel | Detecteur de fuite compact |
| FR2787192B1 (fr) * | 1998-12-10 | 2001-01-05 | Cit Alcatel | Vitesse variable sur le pompage primaire d'un detecteur de fuites par gaz traceur |
| US7320224B2 (en) * | 2004-01-21 | 2008-01-22 | Brooks Automation, Inc. | Method and apparatus for detecting and measuring state of fullness in cryopumps |
| US7641809B2 (en) | 2004-02-26 | 2010-01-05 | E. I. Du Pont De Nemours And Company | Tracer-containing compositions |
| US20080229928A1 (en) * | 2007-03-20 | 2008-09-25 | Urbahn John A | Sorption pump with integrated thermal switch |
| DE102009059824A1 (de) * | 2009-12-21 | 2011-06-22 | Inficon GmbH, 50968 | Verfahren und Vorrichtung zur Leckbestimmung |
| CN103711678A (zh) * | 2013-12-30 | 2014-04-09 | 马钢(集团)控股有限公司 | 一种防止低温液体泵传动轴冻结的方法和装置 |
| US10488292B1 (en) | 2014-10-16 | 2019-11-26 | Leak Detection Technologies, Inc. | Leak detection system |
| US9841344B2 (en) | 2016-03-29 | 2017-12-12 | Leak Detection Technologies, Inc. | System and methods for monitoring leaks in underground storage tanks |
| US11149723B2 (en) * | 2019-12-31 | 2021-10-19 | Psg California Llc | Diaphragm pump leak detection |
| GB2621830A (en) * | 2022-08-22 | 2024-02-28 | Atomic Energy Authority Uk | Improvements in and relating to fusion reactor fuel recovery |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4023398A (en) * | 1975-03-03 | 1977-05-17 | John Barry French | Apparatus for analyzing trace components |
| US4150549A (en) * | 1977-05-16 | 1979-04-24 | Air Products And Chemicals, Inc. | Cryopumping method and apparatus |
| GB1603527A (en) * | 1978-05-12 | 1981-11-25 | Sciex Inc | Multiple stage cryogenic pump and method of pumping |
| JPS58105032A (ja) * | 1981-12-18 | 1983-06-22 | Tokuda Seisakusho Ltd | ヘリウム質量分析型漏洩試験装置 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3137551A (en) * | 1959-10-02 | 1964-06-16 | John T Mark | Ultra high vacuum device |
| US3262279A (en) * | 1964-10-09 | 1966-07-26 | Little Inc A | Extreme high vacuum apparatus |
| US3425233A (en) * | 1966-08-26 | 1969-02-04 | United Aircraft Corp | Process and means for regulating the pressure and flow of a stored fluid |
| US3395548A (en) * | 1966-11-07 | 1968-08-06 | Mcmullen John J | Vessel for transporting liquefied gas at about ambient pressure |
| DE1628449A1 (de) * | 1967-06-03 | 1971-09-16 | Telefunken Patent | Anordnung zur Erzeugung von Ultrahochvakuum |
| US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
| US3620029A (en) * | 1969-10-20 | 1971-11-16 | Air Prod & Chem | Refrigeration method and apparatus |
| US3721101A (en) * | 1971-01-28 | 1973-03-20 | Cryogenic Technology Inc | Method and apparatus for cooling a load |
| US4285710A (en) * | 1978-09-18 | 1981-08-25 | Varian Associates, Inc. | Cryogenic device for restricting the pumping speed of selected gases |
| DE2942305C2 (de) * | 1979-10-19 | 1986-11-27 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Kryosammler |
| SU992814A2 (ru) * | 1981-12-31 | 1983-01-30 | Физико-технический институт низких температур АН УССР | Криогенный конденсационный насос |
-
1984
- 1984-04-10 US US06/598,622 patent/US4593530A/en not_active Expired - Fee Related
-
1985
- 1985-04-04 EP EP85104152A patent/EP0158295A3/fr not_active Withdrawn
- 1985-04-09 JP JP60073656A patent/JPS60230029A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4023398A (en) * | 1975-03-03 | 1977-05-17 | John Barry French | Apparatus for analyzing trace components |
| US4150549A (en) * | 1977-05-16 | 1979-04-24 | Air Products And Chemicals, Inc. | Cryopumping method and apparatus |
| GB1603527A (en) * | 1978-05-12 | 1981-11-25 | Sciex Inc | Multiple stage cryogenic pump and method of pumping |
| JPS58105032A (ja) * | 1981-12-18 | 1983-06-22 | Tokuda Seisakusho Ltd | ヘリウム質量分析型漏洩試験装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0158295A3 (fr) | 1987-11-25 |
| US4593530A (en) | 1986-06-10 |
| EP0158295A2 (fr) | 1985-10-16 |
| JPS60230029A (ja) | 1985-11-15 |
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