JPH0459471U - - Google Patents
Info
- Publication number
- JPH0459471U JPH0459471U JP1990101411U JP10141190U JPH0459471U JP H0459471 U JPH0459471 U JP H0459471U JP 1990101411 U JP1990101411 U JP 1990101411U JP 10141190 U JP10141190 U JP 10141190U JP H0459471 U JPH0459471 U JP H0459471U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor chip
- cantilevers
- directions
- axes
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990101411U JPH0712932Y2 (ja) | 1990-09-27 | 1990-09-27 | 半導体加速度センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990101411U JPH0712932Y2 (ja) | 1990-09-27 | 1990-09-27 | 半導体加速度センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0459471U true JPH0459471U (enExample) | 1992-05-21 |
| JPH0712932Y2 JPH0712932Y2 (ja) | 1995-03-29 |
Family
ID=31844832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990101411U Expired - Lifetime JPH0712932Y2 (ja) | 1990-09-27 | 1990-09-27 | 半導体加速度センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0712932Y2 (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04186676A (ja) * | 1990-11-16 | 1992-07-03 | Fuji Electric Co Ltd | 半導体式加速度センサ及びその製造方法 |
| JPH07325104A (ja) * | 1994-06-01 | 1995-12-12 | Zexel Corp | 加速度センサ |
| JP2010014406A (ja) * | 2008-06-30 | 2010-01-21 | Toshiba Corp | 慣性センサ及び慣性検出装置 |
| JP2011116201A (ja) * | 2009-12-02 | 2011-06-16 | Stanley Electric Co Ltd | ヘッドランプの光軸調整装置 |
-
1990
- 1990-09-27 JP JP1990101411U patent/JPH0712932Y2/ja not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04186676A (ja) * | 1990-11-16 | 1992-07-03 | Fuji Electric Co Ltd | 半導体式加速度センサ及びその製造方法 |
| JPH07325104A (ja) * | 1994-06-01 | 1995-12-12 | Zexel Corp | 加速度センサ |
| JP2010014406A (ja) * | 2008-06-30 | 2010-01-21 | Toshiba Corp | 慣性センサ及び慣性検出装置 |
| JP2011116201A (ja) * | 2009-12-02 | 2011-06-16 | Stanley Electric Co Ltd | ヘッドランプの光軸調整装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0712932Y2 (ja) | 1995-03-29 |