JPH0459471U - - Google Patents
Info
- Publication number
- JPH0459471U JPH0459471U JP1990101411U JP10141190U JPH0459471U JP H0459471 U JPH0459471 U JP H0459471U JP 1990101411 U JP1990101411 U JP 1990101411U JP 10141190 U JP10141190 U JP 10141190U JP H0459471 U JPH0459471 U JP H0459471U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor chip
- cantilevers
- directions
- axes
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001133 acceleration Effects 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 6
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
Description
第１図は本考案の第１の実施例の構造を示す図
、第２図は第１の実施例の加速度検出動作を説明
するための図、第３図ａ，ｂ，ｃは第１図のＢ−
Ｂ線に沿う断面構造（梁ウの断面構造）が形成さ
れるプロセスを示す図、第４図は本考案の第２の
実施例の構造を示す図、第５図および第６図は第
２の実施例の動作を説明するための図、第７図ａ
，ｂ，ｃは第４図のｃ−ｃ線に沿う断面構造が形
成されるプロセスを示す図、第８図および第９図
は従来例の構成を説明するための図である。
１，２，３……質量部、４……ダイアフラム（
たわみ部）、６……固定（センサ取付け）面、７
……出力アンプ、ア〜ケ……梁、Ｒ１〜Ｒ４……
ピエゾ抵抗。
FIG. 1 is a diagram showing the structure of the first embodiment of the present invention, FIG. 2 is a diagram for explaining the acceleration detection operation of the first embodiment, and FIGS. B-
A diagram showing the process of forming the cross-sectional structure (cross-sectional structure of the beam C) along line B, FIG. 4 is a diagram showing the structure of the second embodiment of the present invention, and FIGS. 5 and 6 are the second embodiment. FIG. 7a is a diagram for explaining the operation of the embodiment of
, b, and c are diagrams showing the process of forming the cross-sectional structure along the line c-c in FIG. 4, and FIGS. 8 and 9 are diagrams for explaining the configuration of the conventional example. 1, 2, 3... Parts by mass, 4... Diaphragm (
Flexible part), 6...Fixed (sensor mounting) surface, 7
...Output amplifier, A~K...Beam, R1~R4...
Piezo resistance.
Claims (1)
加速度をそれぞれ検出する第１、第２、第３のカ
ンチレバーを一つの半導体チツプに有し、該半導
体チツプの取付け面に平行な上記２軸の方向のカ
ンチレバーの構造が線対称となつていることを特
徴とする半導体加速度センサ。 (2) 互いに直交するＸ，Ｙ，Ｚの３軸の方向の
加速度をそれぞれ検出する第１、第２、第３のカ
ンチレバーを一つの半導体チツプに有し、該３つ
のカンチレバーのうちの２つの構造が、半導体チ
ツプの中心点に関して点対称の関係にあることを
特徴とする半導体加速度センサ。[Claims for Utility Model Registration] (1) One semiconductor chip has first, second, and third cantilevers that detect acceleration in the directions of three axes, X, Y, and Z, which are perpendicular to each other. A semiconductor acceleration sensor characterized in that the structure of the cantilever is line-symmetrical in the directions of the two axes parallel to the mounting surface of the semiconductor chip. (2) One semiconductor chip has first, second, and third cantilevers that detect acceleration in the directions of three axes, X, Y, and Z, which are orthogonal to each other, and two of the three cantilevers A semiconductor acceleration sensor characterized in that its structure is point symmetrical with respect to the center point of a semiconductor chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990101411U JPH0712932Y2 (en) | 1990-09-27 | 1990-09-27 | Semiconductor acceleration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990101411U JPH0712932Y2 (en) | 1990-09-27 | 1990-09-27 | Semiconductor acceleration sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0459471U true JPH0459471U (en) | 1992-05-21 |
| JPH0712932Y2 JPH0712932Y2 (en) | 1995-03-29 |
Family
ID=31844832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990101411U Expired - Lifetime JPH0712932Y2 (en) | 1990-09-27 | 1990-09-27 | Semiconductor acceleration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0712932Y2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04186676A (en) * | 1990-11-16 | 1992-07-03 | Fuji Electric Co Ltd | Semiconductor acceleration sensor, and manufacture thereof |
| JPH07325104A (en) * | 1994-06-01 | 1995-12-12 | Zexel Corp | Acceleration sensor |
| JP2010014406A (en) * | 2008-06-30 | 2010-01-21 | Toshiba Corp | Inertial sensor and inertial detector |
| JP2011116201A (en) * | 2009-12-02 | 2011-06-16 | Stanley Electric Co Ltd | Optical axis adjusting device of headlamp |
-
1990
- 1990-09-27 JP JP1990101411U patent/JPH0712932Y2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04186676A (en) * | 1990-11-16 | 1992-07-03 | Fuji Electric Co Ltd | Semiconductor acceleration sensor, and manufacture thereof |
| JPH07325104A (en) * | 1994-06-01 | 1995-12-12 | Zexel Corp | Acceleration sensor |
| JP2010014406A (en) * | 2008-06-30 | 2010-01-21 | Toshiba Corp | Inertial sensor and inertial detector |
| JP2011116201A (en) * | 2009-12-02 | 2011-06-16 | Stanley Electric Co Ltd | Optical axis adjusting device of headlamp |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0712932Y2 (en) | 1995-03-29 |
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