JPH0459471U - - Google Patents

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Publication number
JPH0459471U
JPH0459471U JP1990101411U JP10141190U JPH0459471U JP H0459471 U JPH0459471 U JP H0459471U JP 1990101411 U JP1990101411 U JP 1990101411U JP 10141190 U JP10141190 U JP 10141190U JP H0459471 U JPH0459471 U JP H0459471U
Authority
JP
Japan
Prior art keywords
semiconductor chip
cantilevers
directions
axes
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1990101411U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0712932Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990101411U priority Critical patent/JPH0712932Y2/ja
Publication of JPH0459471U publication Critical patent/JPH0459471U/ja
Application granted granted Critical
Publication of JPH0712932Y2 publication Critical patent/JPH0712932Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Pressure Sensors (AREA)
JP1990101411U 1990-09-27 1990-09-27 半導体加速度センサ Expired - Lifetime JPH0712932Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990101411U JPH0712932Y2 (ja) 1990-09-27 1990-09-27 半導体加速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990101411U JPH0712932Y2 (ja) 1990-09-27 1990-09-27 半導体加速度センサ

Publications (2)

Publication Number Publication Date
JPH0459471U true JPH0459471U (OSRAM) 1992-05-21
JPH0712932Y2 JPH0712932Y2 (ja) 1995-03-29

Family

ID=31844832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990101411U Expired - Lifetime JPH0712932Y2 (ja) 1990-09-27 1990-09-27 半導体加速度センサ

Country Status (1)

Country Link
JP (1) JPH0712932Y2 (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04186676A (ja) * 1990-11-16 1992-07-03 Fuji Electric Co Ltd 半導体式加速度センサ及びその製造方法
JPH07325104A (ja) * 1994-06-01 1995-12-12 Zexel Corp 加速度センサ
JP2010014406A (ja) * 2008-06-30 2010-01-21 Toshiba Corp 慣性センサ及び慣性検出装置
JP2011116201A (ja) * 2009-12-02 2011-06-16 Stanley Electric Co Ltd ヘッドランプの光軸調整装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04186676A (ja) * 1990-11-16 1992-07-03 Fuji Electric Co Ltd 半導体式加速度センサ及びその製造方法
JPH07325104A (ja) * 1994-06-01 1995-12-12 Zexel Corp 加速度センサ
JP2010014406A (ja) * 2008-06-30 2010-01-21 Toshiba Corp 慣性センサ及び慣性検出装置
JP2011116201A (ja) * 2009-12-02 2011-06-16 Stanley Electric Co Ltd ヘッドランプの光軸調整装置

Also Published As

Publication number Publication date
JPH0712932Y2 (ja) 1995-03-29

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