JPH0459153U - - Google Patents
Info
- Publication number
- JPH0459153U JPH0459153U JP10038290U JP10038290U JPH0459153U JP H0459153 U JPH0459153 U JP H0459153U JP 10038290 U JP10038290 U JP 10038290U JP 10038290 U JP10038290 U JP 10038290U JP H0459153 U JPH0459153 U JP H0459153U
- Authority
- JP
- Japan
- Prior art keywords
- groove
- semiconductor wafer
- grooved
- carrier
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10038290U JPH0459153U (tr) | 1990-09-25 | 1990-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10038290U JPH0459153U (tr) | 1990-09-25 | 1990-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0459153U true JPH0459153U (tr) | 1992-05-21 |
Family
ID=31842990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10038290U Pending JPH0459153U (tr) | 1990-09-25 | 1990-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0459153U (tr) |
-
1990
- 1990-09-25 JP JP10038290U patent/JPH0459153U/ja active Pending