JPH03109340U - - Google Patents
Info
- Publication number
- JPH03109340U JPH03109340U JP1804590U JP1804590U JPH03109340U JP H03109340 U JPH03109340 U JP H03109340U JP 1804590 U JP1804590 U JP 1804590U JP 1804590 U JP1804590 U JP 1804590U JP H03109340 U JPH03109340 U JP H03109340U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support
- vacuuming
- tweezer
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910003460 diamond Inorganic materials 0.000 claims description 2
- 239000010432 diamond Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1804590U JPH03109340U (tr) | 1990-02-22 | 1990-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1804590U JPH03109340U (tr) | 1990-02-22 | 1990-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03109340U true JPH03109340U (tr) | 1991-11-11 |
Family
ID=31521221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1804590U Pending JPH03109340U (tr) | 1990-02-22 | 1990-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03109340U (tr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10298780A (ja) * | 1997-02-20 | 1998-11-10 | Citizen Watch Co Ltd | 絶縁材への被膜形成方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02186656A (ja) * | 1989-01-13 | 1990-07-20 | Hitachi Ltd | 低発塵装置 |
-
1990
- 1990-02-22 JP JP1804590U patent/JPH03109340U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02186656A (ja) * | 1989-01-13 | 1990-07-20 | Hitachi Ltd | 低発塵装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10298780A (ja) * | 1997-02-20 | 1998-11-10 | Citizen Watch Co Ltd | 絶縁材への被膜形成方法 |