JPH0459132U - - Google Patents
Info
- Publication number
- JPH0459132U JPH0459132U JP10063490U JP10063490U JPH0459132U JP H0459132 U JPH0459132 U JP H0459132U JP 10063490 U JP10063490 U JP 10063490U JP 10063490 U JP10063490 U JP 10063490U JP H0459132 U JPH0459132 U JP H0459132U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- treatment plate
- cover
- plate
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10063490U JP2523690Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板の熱処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10063490U JP2523690Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板の熱処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0459132U true JPH0459132U (enExample) | 1992-05-21 |
| JP2523690Y2 JP2523690Y2 (ja) | 1997-01-29 |
Family
ID=31843420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10063490U Expired - Lifetime JP2523690Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板の熱処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2523690Y2 (enExample) |
-
1990
- 1990-09-25 JP JP10063490U patent/JP2523690Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2523690Y2 (ja) | 1997-01-29 |