JPH0456371A - Gas laser exciter - Google Patents

Abstract

PURPOSE:To allow a temperature to rise little even if a smaller output transformer is used by using a high-frequency transformer as the output transformer of a high-voltage power supply and specifying the diameter of the wires of its primary and secondary windings. CONSTITUTION:The diameter of the wire of a primary winding 22 is selected from a range of 0.5-3.5mm and that of a secondary winding 23 is selected from a range of 0.1-0.5mm. The primary and secondary windings 22 and 23 are wound coaxially around a shaft of the same diameter as the feet of ferrite cores 24 and 25, the shaft is removed, and one pair of the feet of the ferrite cores 24 and 25 are fitted and joined therein and fastened with a core holder by pressing inside. If the diameter of the wire of the primary winding is smaller than 0.5mm, the temperature rises rapidly. If larger than 3.5mm, the size of the high-frequency transformer increases rapidly. If the diameter of the wire of the secondary winding is smaller than 0.1mm, the temperature rises rapidly. If larger than 0.5mm, the size of the high-frequency transformer increases rapidly.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an axial flow type gas laser oscillation device in which the axial direction of a discharge tube and the optical axis direction are coincident, and in particular to a reliable oscillator with less variation in output characteristics. This relates to high quality gas laser oscillation equipment.

2. Description of the Related Art An example of a conventional axial flow type gas laser oscillation device is shown in FIG. In FIG. 4, 1 is a discharge tube made of a dielectric material such as glass, and 2 and 3 are electrodes provided inside the discharge tube 1. In FIG. A high voltage power supply 4 is connected to the electrodes 2 and 3, and applies a voltage of, for example, about 30 kV between the picture electrodes 2 and 3. 5 is a discharge space within the discharge tube 1 formed between the electrodes 2 and 3. 6 is a total reflection mirror, 7 is a partial reflection mirror,
The total reflection mirror 6 and the partial reflection mirror 7 are fixedly arranged at both ends of the discharge space 5 and constitute an optical resonator. Reference numeral 8 denotes a laser beam output from the partial reflecting mirror 7 in the axial direction of the discharge tube 1. Reference numeral 9 denotes an air supply pipe for supplying laser gas to the discharge tube 1, and the laser gas circulates in the direction of arrow 10 within this gas laser device. Reference numerals 11 and 12 designate heat exchangers for lowering the temperature of the laser gas that has increased in temperature due to discharge or the like in the discharge space 5 inside the discharge tube 1. 13 is a blower for circulating the laser gas, and the discharge space 5
A gas flow of approximately 100 m/see is generated.

Next, the operation of the conventional axial flow type gas laser oscillation device will be explained. First, a high voltage is applied from the high voltage power supply 4 to the pair of electrodes 2.3 to generate a glow-like discharge in the discharge space 5. The laser gas passing through the discharge space 5 is excited by obtaining this discharge energy, and the excited laser gas enters a resonant state in the optical resonator formed by the total reflection mirror 6 and the partial reflection mirror 7, and is emitted from the partial reflection mirror 7. A laser beam 8 is output. This laser beam 8 is used for purposes such as laser processing.

FIG. 5 is a schematic block diagram showing the configuration of the high voltage power supply 4 in the gas laser generator.

In Fig. 5, 14 is a commercial power supply, 15 is a rectifier, and 16 is a commercial power supply.
1 is a smoothing capacitor, 17 is a switching power supply, 18 is a high frequency transformer, and 19 is a high voltage DC smoothing circuit.

Next, the operation of the conventional high voltage power supply will be explained. The three-phase 200V AC voltage sent from the commercial power supply ↓ 4 is rectified by a rectifier 15 and smoothed by a smoothing capacitor, and then converted to a high-frequency AC voltage by a switching power supply 17 and input to a high-frequency transformer 18. High frequency transformer 1
8 converts the low voltage AC input into the primary side into high voltage AC and outputs it to the secondary side, and the high voltage AC is rectified and smoothed by the high voltage DC smoothing circuit 19, and then passed through the electrodes 2 and 8 of the discharge tube 1. 3 is input.

Normally, a gas laser oscillation device is equipped with a plurality of discharge tubes, and in the circuit configuration shown in FIG. Since it is connected,
It becomes possible to share a plurality of high frequency transformers 18 with one switching power supply 17, and it is possible to reduce the size of the device.

FIG. 6 shows a schematic cross section of the high frequency transformer 18, in which a secondary winding 18b is wound around the outer periphery of the primary winding 18a, coaxially with the primary winding 18a, and has several thousand turns or more. 2
The next winding 18b has a random winding structure. A pair of U-shaped ferrite cores 20 are used as the cores, and the abutting surfaces 20a of the ferrite cores 20 (7) are in close contact with each other.

Problems to be Solved by the Invention However, in such conventional gas laser oscillation devices, when the output transformer is made smaller, a large amount of heat is generated when the gas laser is operated, and the temperature of the output transformer becomes high, making it difficult to oscillate the gas laser. There was a problem that the output of the device was unstable.

The present invention is intended to solve these conventional problems, and aims to provide a highly reliable gas laser oscillation device in which the temperature rise is small even when the output transformer is downsized.

Means for Solving the Problems In order to achieve the above object, the present invention uses a high frequency transformer as the output transformer of the high voltage power supply for generating high voltage, and the wire diameter of the primary winding is 0.5. The wire diameter of the secondary winding is 0.1 to 0.5 mm.

According to the present invention, the wire diameters of the primary winding and the secondary winding of the high-frequency transformer are set within an appropriate range due to the above configuration, so that even if the output transformer is downsized, the temperature rise can be suppressed to a small level. This makes it possible to stabilize the output of the gas laser oscillation device.

EXAMPLE Hereinafter, an example of the present invention will be described with reference to the drawings.
Since the present invention differs from the conventional example only in the structure of the high frequency transformer of the high voltage power supply, only the structure of the high frequency transformer will be described below.

FIG. 1 is a schematic sectional view of a high frequency transformer of a gas laser oscillation device in one embodiment of the present invention. In FIG. 1, 21 is a high frequency transformer, 22 is a primary winding, and 23 is a secondary winding coaxially wound above the primary winding 22 with an insulating distance. . Reference numerals 24 and 25 designate a pair of ferrite cores formed in a U-shape, which are butted against each other and integrated. The wire diameter of the primary winding 22 is 0.
．． The wire diameter of the secondary winding is selected from the range of 0.1 to 0.5 mm.

The primary winding 22 and the secondary winding 23 are coaxially wound in advance around shafts having the same diameter as the legs of the ferrite cores 24, 25, and then the ferrite cores 24, 2 are inserted into the holes from which the shafts have been removed.
5 and are abutted against each other internally, and are pressed inwardly and fixed to each other by a core holder (not shown).

Figures 2 (A) and (B) show the relationship between the primary winding diameter of the high-frequency transformer, the temperature rise rate, and the size of the high-frequency transformer. This shows that when the temperature rises rapidly and the diameter of the primary winding exceeds 3.5 mm, the size of the high-frequency transformer suddenly increases.

On the other hand, Figures 3 (A) and (B) show the relationship between the secondary winding diameter of the high-frequency transformer, the temperature rise rate, and the size of the high-frequency transformer. If the temperature drops below 0.5mm, the temperature rises rapidly and the secondary winding diameter is
This shows that the size of the high-frequency transformer increases rapidly when the value exceeds .

Therefore, the high frequency transformer has a primary winding diameter of 0.5
to 3.5 mm, and the secondary winding diameter is from 0.1 to 0.
If it is set within the range of 5 mm, the temperature rise will be small and the size will not increase too much.

In the above embodiment, the wire diameter of the primary winding 22 of the ferrite core 24.25 of the high frequency transformer 21 is 0.5 to 3.5.
Select from within the range of mm, and set the wire diameter of the secondary winding 23 to 0.1 mm.
Since the wire was selected within the range of 0.5 mm, even if the high-frequency transformer is made smaller, the temperature rise of the high-frequency transformer due to inappropriate wire diameter can be minimized, and the gas laser oscillator can operate stably. I can do it.

Effects of the Invention As described above, in the gas laser oscillation device of the present invention, the output transformer of the high voltage power supply that generates high voltage is a high frequency transformer, and the wire diameter of the primary winding is 0.5 to 3.5 mm.
Since the wire diameter of the secondary winding is set to 0.1 to 0.5 mm, the temperature rise can be suppressed even if the output transformer is made smaller, and highly reliable gas laser oscillation with less variation in output characteristics can be achieved. The device can be realized.

[Brief explanation of the drawing]

FIG. 1 is a schematic cross-sectional view of a high-frequency transformer of a gas laser oscillation device according to an embodiment of the present invention, and FIGS. 2 (A) and (B)
Figure 3 is a graph showing the relationship between the primary winding diameter of a high-frequency transformer, the temperature rise rate, and the size of the high-frequency transformer.
A) and (B) are graphs showing the relationship between the secondary winding diameter of the high-frequency transformer, the temperature rise rate, and the size of the high-frequency transformer. FIG. 5 is a schematic block diagram of a high voltage power supply in the laser oscillation device, and FIG. 6 is a schematic sectional view of a conventional high frequency transformer. DESCRIPTION OF SYMBOLS 1... Discharge tube, 2, 3... Electrode, 4... High voltage power supply, 5... Discharge space, 6... Total reflection mirror, 7... Partial reflection mirror, 8... Laser beam, 9...Air pipe, 1
0... Laser gas flow direction, 11.12... Heat exchanger, 13... Blower, 14... Commercial power supply, 15.
... Rectifier, 16... Smoothing capacitor, 17... Switching power supply, 18... High frequency transformer, 18a...
...Primary winding, 18b...Secondary winding, 19...
High voltage DC smoothing circuit, 20... Ferrite core, 20a
...Abutting surface, 21...High frequency transformer, 22
...Primary winding, 23...Secondary winding, 24.25
···Ferrite core. Name of agent Patent attorney Hiroshi Masaaki Kura Fig. 1 Ferrite core Fig. 4 Fig. 5 17 Switching power supply 19 High voltage DC smoothing circuit Fig. 2 (Al + B) Primary winding diameter (mml Fig. 3 Primary side Winding diameter (mm1 Secondary winding diameter (mm1) Secondary winding diameter (mm) Figure 6

Claims (1)

[Claims] A blower causes laser gas to flow through a discharge tube made of an insulator in the optical axis direction, a high voltage power source is connected between electrodes provided at both ends of the discharge tube, and a discharge is generated within the discharge tube.
In a gas laser oscillator that generates a laser beam in the axial direction of the discharge tube using the discharge as a laser excitation source, the output transformer of the high voltage power supply is a high frequency transformer, and the wire diameter of the primary winding is from 0.5 to 0.5. 3.5 mm, and the wire diameter of the secondary winding is 0.1 to 0.5 mm.