JPH0437007A - Gas laser oscillator - Google Patents

Abstract

PURPOSE:To obtain a gas laser oscillator which reduces power loss and has high reliability by coaxially winding primary and secondary windings in an output transformer to be used as a high voltage power source in such a manner that their interval is 20 mm or less, and forming an insulating structure between the winding. CONSTITUTION:In a high frequency transformer 30 of a high voltage power source, a primary winding 32 is wound in a square ring-shaped ferrite core 31, and a coil bobbin 33 is provided at a position separated at a predetermined distance. A secondary winding 34 coaxial with the primary winding is wound on the bobbin 33. When an interval L2 between the windings exceeds 20 mm, power loss is abruptly raised. Accordingly, an interval L between the windings is set to this value or less to improve power conversion efficiency and to reduce heat generation, thereby preventing deterioration of the transformer.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a gas laser oscillation device using a discharge tube, and more particularly to a gas laser oscillation device using a high-voltage power source.

[Prior Art] In a conventional gas laser oscillation device, for example, as shown in FIG. 3, metal electrodes 2 and 3 are attached to a discharge tube made of glass or the like in close contact with the outer circumferential surface of the discharge tube with the central portion sandwiched therebetween. A high voltage power source 4 is connected between the metal electrodes 2 and 3. The high voltage power supply 4 applies a high voltage of, for example, 30 KV between the metal electrodes 2.3.

A discharge space 5 within the discharge tube 1 is formed between the metal electrodes 2 and 3. A total reflection mirror 6 and a partial reflection mirror 7 are provided at both ends of the discharge tube 10.
are fixed at both ends of the discharge space 5 to form an optical resonator. The laser gas inside the discharge tube 1 is configured to be circulated by a blower 8 and an air pipe 9. The blower 8 causes laser gas to flow through the discharge space 5 at a speed of about 100 m/sec. Heat exchangers 10 and II are provided on the suction port and discharge port sides of the blower 8 in order to lower the temperature of the increased laser gas. The blower 8.degree. air pipe 9 and heat exchanger 10.11 constitute a laser gas circulation device 12 for circulating laser gas within the discharge tube.

FIG. 4 is a diagram showing the configuration of the high voltage power supply 4. As shown in FIG.

In this figure, a switching power supply 21 is provided with a plurality of high frequency transformers 22 and a DC smoothing circuit 23 connected to each high frequency transformer. Since there are usually a plurality of discharge tubes in a gas laser oscillation device, a high frequency transformer 22 and a DC smoothing circuit 23 are required for each discharge tube. Since the switching power supply is connected to the primary side of the high frequency transformer 22, the output of one switching power supply is given to each high frequency transformer, thereby reducing the size of the device.

FIG. 5 is a diagram showing a detailed configuration of the high frequency transformer 22. In this diagram, the high frequency transformer is a ferrite core 24
A primary winding 25 is wound around the primary winding, and a coil bobbin 26 is provided coaxially around the primary winding at a certain distance from the primary winding.
A secondary winding 27 is wound here. A distance L1 between the secondary winding 25 and the secondary winding 27 is, for example, 50 m or more apart in order to provide an insulation distance.

[Problem to be solved by the invention]

However, such conventional high-frequency transformers have a drawback that the power conversion efficiency of the high-frequency transformer is poor because the leakage inductance due to the gap between the negative winding and the secondary winding is large. Also, due to poor power conversion efficiency, it easily generates heat.
Another drawback was that the high-frequency transformer itself was susceptible to deterioration.

The present invention has been made in view of the problems of the conventional high frequency transformer, and a technical object thereof is to provide a gas laser oscillation device that reduces power loss and has high reliability.

[Means to solve the problem]

The present invention provides a discharge tube, an optical resonator provided at both ends of the discharge tube, a laser gas circulation device for circulating laser gas within the discharge tube, a pair of electrodes provided on the outer peripheral surface of the discharge tube, and a high voltage between the electrodes. A gas laser oscillator has a high-voltage power source that applies a voltage and discharges the voltage, and the output transformer used for the high-voltage power source has a primary winding and a secondary winding that are coaxially wound with an interval of 20 mm or less, and It is characterized by an insulating structure between the lines.

[Function] According to the present invention having such characteristics, since the primary winding and the secondary winding of the high frequency transformer are coaxially wound and the interval between them is 20 mm or less, it is possible to convert electric power with high efficiency. .

〔Example〕

FIG. 1 is a sectional view showing the configuration of a high frequency transformer used in a gas laser oscillation device according to an embodiment of the present invention.

The basic configuration of this gas laser oscillation device is the same as that of the conventional example described above.

High frequency transformer 30 of high voltage power supply used in this embodiment
As shown in FIG. 1, a primary winding 32 is wound around a square ring-shaped ferrite core 31, and a coil bobbin 33 is provided at a certain distance from the primary winding 32. As in the conventional example described above, a secondary winding 34 coaxially wound with the primary winding is wound around the coil bobbin 33. In this embodiment, the distance between the primary winding 32 and the secondary winding 34 is set to a distance that does not cause a sudden increase in power loss. And-
Next volume! 1$32 and second volume! 34, these windings are formed by resin molding 35.

Figure 2 shows the distance L between the primary and secondary windings of a high-frequency transformer.
2 is a graph showing the relationship between the number of power losses and the number of power losses, and shows a state in which the power loss rapidly increases when the distance L2 between the windings exceeds 20 mm. Therefore, power conversion efficiency can be improved by keeping the distance between the windings to be equal to or less than this value. This will reduce heat generation and prevent deterioration of the high frequency transformer.

In this embodiment, the primary winding 32 and the secondary winding 34 are molded with a resin mold 35 in order to insulate them, but the insulation distance is ensured by immersing these windings in oil. Good too.

〔Effect of the invention〕

As described in detail above, according to the present invention, by optimizing the interval between the primary winding and the secondary winding of the high frequency transformer, power loss can be reduced and heat generation in the high frequency transformer can be suppressed. Therefore, it is possible to provide a gas laser oscillation device that emits a stable and highly efficient laser beam.

[Brief explanation of drawings]

Fig. 1 is a cross-sectional view of a high frequency transformer used in a gas laser oscillation device according to an embodiment of the present invention, Fig. 2 is a graph showing the relationship between winding spacing and power loss, and Fig. 3 is a main part of the gas laser oscillation device. 4 is a block diagram showing the structure of a high voltage power supply used in a gas laser oscillation device, and FIG. 5 is a sectional view showing the structure of a conventional high frequency transformer. Engineering・・・・・Discharge tube, 2.3・・・・・Metal electrode, 4・・・・・High voltage power supply, 6・・・・・・Total reflection mirror, 7・・・・Partial reflection Mirror, 8-----Blower, 9-1--Air pipe, 12--Laser gas circulation device, 21--Switching power supply, 23---Direct current Smoothing circuit, 30-・-
・High frequency transformer, 31---------ferrite core, 32------primary winding, 33--coil bobbin, 34------secondary winding 35--
resin mold. Patent applicant Matsushita Electric Industrial Co., Ltd.

Claims (1)

[Claims] (1) a discharge tube; an optical resonator provided at both ends of the discharge tube; a laser gas circulation device for circulating laser gas within the discharge tube; a pair of electrodes provided on the outer peripheral surface of the discharge tube; In a gas laser oscillation device having a high-voltage power source that applies a high voltage between electrodes to cause discharge, an output transformer used for the high-voltage power source has a primary winding and a secondary winding coaxially wound with a spacing of 20 mm or less, and , a gas laser oscillation device characterized by having an insulating structure between windings.