JPH0456341U - - Google Patents

Info

Publication number
JPH0456341U
JPH0456341U JP9822390U JP9822390U JPH0456341U JP H0456341 U JPH0456341 U JP H0456341U JP 9822390 U JP9822390 U JP 9822390U JP 9822390 U JP9822390 U JP 9822390U JP H0456341 U JPH0456341 U JP H0456341U
Authority
JP
Japan
Prior art keywords
wafer carrier
container
storage box
support member
carrier storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9822390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9822390U priority Critical patent/JPH0456341U/ja
Publication of JPH0456341U publication Critical patent/JPH0456341U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Packaging Frangible Articles (AREA)
JP9822390U 1990-09-19 1990-09-19 Pending JPH0456341U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9822390U JPH0456341U (enrdf_load_stackoverflow) 1990-09-19 1990-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9822390U JPH0456341U (enrdf_load_stackoverflow) 1990-09-19 1990-09-19

Publications (1)

Publication Number Publication Date
JPH0456341U true JPH0456341U (enrdf_load_stackoverflow) 1992-05-14

Family

ID=31839223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9822390U Pending JPH0456341U (enrdf_load_stackoverflow) 1990-09-19 1990-09-19

Country Status (1)

Country Link
JP (1) JPH0456341U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012036206A1 (ja) * 2010-09-17 2012-03-22 富士電機株式会社 ウェハ収納具、及びウェハカセットの収納ケース

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012036206A1 (ja) * 2010-09-17 2012-03-22 富士電機株式会社 ウェハ収納具、及びウェハカセットの収納ケース

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