JPH0456341U - - Google Patents
Info
- Publication number
- JPH0456341U JPH0456341U JP9822390U JP9822390U JPH0456341U JP H0456341 U JPH0456341 U JP H0456341U JP 9822390 U JP9822390 U JP 9822390U JP 9822390 U JP9822390 U JP 9822390U JP H0456341 U JPH0456341 U JP H0456341U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- container
- storage box
- support member
- carrier storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9822390U JPH0456341U (cs) | 1990-09-19 | 1990-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9822390U JPH0456341U (cs) | 1990-09-19 | 1990-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0456341U true JPH0456341U (cs) | 1992-05-14 |
Family
ID=31839223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9822390U Pending JPH0456341U (cs) | 1990-09-19 | 1990-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0456341U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012036206A1 (ja) * | 2010-09-17 | 2012-03-22 | 富士電機株式会社 | ウェハ収納具、及びウェハカセットの収納ケース |
-
1990
- 1990-09-19 JP JP9822390U patent/JPH0456341U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012036206A1 (ja) * | 2010-09-17 | 2012-03-22 | 富士電機株式会社 | ウェハ収納具、及びウェハカセットの収納ケース |
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