JPH0456330U - - Google Patents

Info

Publication number
JPH0456330U
JPH0456330U JP9998390U JP9998390U JPH0456330U JP H0456330 U JPH0456330 U JP H0456330U JP 9998390 U JP9998390 U JP 9998390U JP 9998390 U JP9998390 U JP 9998390U JP H0456330 U JPH0456330 U JP H0456330U
Authority
JP
Japan
Prior art keywords
wafer
section
ion implantation
rotates
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9998390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9998390U priority Critical patent/JPH0456330U/ja
Publication of JPH0456330U publication Critical patent/JPH0456330U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9998390U 1990-09-25 1990-09-25 Pending JPH0456330U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9998390U JPH0456330U (enrdf_load_html_response) 1990-09-25 1990-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9998390U JPH0456330U (enrdf_load_html_response) 1990-09-25 1990-09-25

Publications (1)

Publication Number Publication Date
JPH0456330U true JPH0456330U (enrdf_load_html_response) 1992-05-14

Family

ID=31842293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9998390U Pending JPH0456330U (enrdf_load_html_response) 1990-09-25 1990-09-25

Country Status (1)

Country Link
JP (1) JPH0456330U (enrdf_load_html_response)

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