JPH0455366A - Piezoelectric porcelain composition - Google Patents
Piezoelectric porcelain compositionInfo
- Publication number
- JPH0455366A JPH0455366A JP2163532A JP16353290A JPH0455366A JP H0455366 A JPH0455366 A JP H0455366A JP 2163532 A JP2163532 A JP 2163532A JP 16353290 A JP16353290 A JP 16353290A JP H0455366 A JPH0455366 A JP H0455366A
- Authority
- JP
- Japan
- Prior art keywords
- composition
- piezoelectric
- piezoelectric porcelain
- main component
- pbo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 27
- 229910052573 porcelain Inorganic materials 0.000 title claims abstract description 25
- 239000006104 solid solution Substances 0.000 claims description 3
- 230000008878 coupling Effects 0.000 abstract description 13
- 238000010168 coupling process Methods 0.000 abstract description 13
- 238000005859 coupling reaction Methods 0.000 abstract description 13
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract description 8
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract description 6
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 abstract description 6
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 abstract description 5
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 abstract 4
- 239000000470 constituent Substances 0.000 abstract 3
- FIXNOXLJNSSSLJ-UHFFFAOYSA-N ytterbium(III) oxide Inorganic materials O=[Yb]O[Yb]=O FIXNOXLJNSSSLJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000007787 solid Substances 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 description 15
- 230000007423 decrease Effects 0.000 description 5
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000028161 membrane depolarization Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000036962 time dependent Effects 0.000 description 2
- 235000008733 Citrus aurantifolia Nutrition 0.000 description 1
- 101100481408 Danio rerio tie2 gene Proteins 0.000 description 1
- 101100481410 Mus musculus Tek gene Proteins 0.000 description 1
- 229910020684 PbZr Inorganic materials 0.000 description 1
- 235000011941 Tilia x europaea Nutrition 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004571 lime Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は圧電性磁器組成物に関し、特にたとえばセラ
ミックフィルタ、セラミック発振子、セラミックディス
クリミネータおよび表面弾性波素子などに用いられる、
圧電性磁器組成物に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to piezoelectric ceramic compositions, particularly those used in ceramic filters, ceramic oscillators, ceramic discriminators, surface acoustic wave elements, etc.
The present invention relates to a piezoelectric ceramic composition.
（従来技術）
従来、圧電性磁器組成物は、ＰｂＴｉ０．−ＰｂＺｒ（
）＋の２元系にＢ Ｓｌ Ｏｉ 、 Ｃｒｔ０３ 。(Prior Art) Conventionally, piezoelectric ceramic compositions include PbTi0. -PbZr(
) + in the binary system B Sl Oi and Crt03.
ＭｎＯ□、ＺｎＯなどの添加物を加えて、圧電特性の改
善を図ることが試みられている。Attempts have been made to improve the piezoelectric properties by adding additives such as MnO□ and ZnO.
さらに、ＰｂＴｉ０ｚ ＰｂＺｒ０１ Ｐｂ （Ｍｎ
１７３ Ｎ ｂｇ／＋ ） ０３系およびｐｂＴｉｏｓ
ＰｂＺｒＯａ ｐｂ （Ｍｇ＋ｚｓ Ｎｂｔｉｓ ）
Ｏｓ系などの３元系の圧電性磁器組成物も、開発され
ている。Furthermore, PbTi0z PbZr01 Pb (Mn
173 N bg/+ ) 03 series and pbTios
PbZrOa pb (Mg+zs Nbtis)
Ternary piezoelectric ceramic compositions such as Os-based piezoelectric ceramic compositions have also been developed.
また、特公昭４５−３７９０７号には、Ｐｂ（Ｎｉｌ／
３ Ｎｂｔｉｓ ）Ｏｓ ＰｂＴｉ（）＋ ＰｂＺ
ｒＯ３系の圧電性磁器組成物が、開示されている。In addition, in Special Publication No. 45-37907, Pb(Nil/
3 Nbtis)Os PbTi()+PbZ
An rO3-based piezoelectric ceramic composition is disclosed.
さらに、特公昭４５−３０１５２号には、ｐｂ（Ｙｂ＋
ｚｔ Ｎｂ＋ｚｘ ）０３ ＰｂＴｉＯ３ＰｂＺｒＯ
３−Ｍｎ０□の圧電性磁器組成物が開示されている。Furthermore, in Japanese Patent Publication No. 45-30152, pb(Yb+
zt Nb+zx )03 PbTiO3PbZrO
A piezoelectric porcelain composition of 3-Mn0□ is disclosed.
（発明が解決しようとする課題）
しかしながら、このような従来の圧電性磁器組成物から
なる圧電性磁器では、耐熱性および共振周波数の経時変
化特性などに大きな問題を有している。(Problems to be Solved by the Invention) However, piezoelectric porcelain made of such conventional piezoelectric porcelain compositions has major problems in heat resistance, resonant frequency change characteristics over time, and the like.
従来例としてたとえばＰ ｂ （（Ｎ ｉ ＋／３ Ｎ
ｂｚｙｓ ） ｏ、ｏｔＴｊ Ｏ，４？Ｚ ｒ ｏ、
ａｉ） ０３の耐熱特性を第１図のグラフに破線で示す
ように、従来の圧電性磁器組成物からなる圧電性磁器で
は、それを加熱していくと、キュリー点よりも約１００
℃以上低い温度から徐々に熱による脱分極を起こし、圧
電特性の劣化が始まる。このため、その圧電性磁器の使
用上限温度は、キュリー点よりはるかに下の２００℃付
近に限定されている。この原因は、第３成分固溶によっ
てキュリー点が低下してしまうことと、圧電性磁器が本
質的に脱分極を起こしやすいことが挙げられる。As a conventional example, for example, P b ((N i +/3 N
bzys) o,otTj O,4? Zro,
ai) As shown by the broken line in the graph of Figure 1, piezoelectric porcelain made of a conventional piezoelectric porcelain composition has a temperature of about 100° below the Curie point when heated.
Depolarization due to heat gradually occurs at temperatures as low as ℃ or higher, and piezoelectric properties begin to deteriorate. For this reason, the upper limit temperature for use of the piezoelectric porcelain is limited to around 200° C., which is far below the Curie point. The causes of this are that the Curie point is lowered by the solid solution of the third component and that piezoelectric porcelain is inherently prone to depolarization.
その一方で近年、電子部品のチップ化が進み、小型の表
面実装が可能な圧電素子、すなわちセラミックフィルタ
、セラミック発振子ディスクリミネータ、トラップなど
のチップ素子が開発されている。従来のリード付樹脂モ
ールド素子や金属ケースに封入された素子では、はんだ
付は実装時に圧電セラミックの温度上昇は２００℃程度
に抑えられているが、これらのチップ素子では、はんだ
付けのときに圧電セラミックも３００℃程度の高温にさ
らされる。On the other hand, in recent years, the use of electronic components as chips has progressed, and chip elements such as small piezoelectric elements that can be surface mounted, ie, ceramic filters, ceramic oscillator discriminators, and traps, have been developed. With conventional resin molded elements with leads or elements sealed in metal cases, the temperature rise of the piezoelectric ceramic during soldering is suppressed to about 200°C. Ceramics are also exposed to high temperatures of around 300°C.
したがって、従来の圧電性磁器組成物では、耐熱性にお
いて高信較性のチップ部品を作ることが不可能である。Therefore, with conventional piezoelectric porcelain compositions, it is impossible to produce chip components with high reliability in terms of heat resistance.
また、上述の従来例の共振周波数の経時変化特性を第２
図のグラフに破線で示すように、従来の圧電性磁器組成
物からなる圧電性磁器では、共振周波数の経時変化にも
大きな問題があった。第２図には圧電セラミックを分極
処理してからの経過時間を横軸に対数目盛りで示し、共
振周波数の変化率を縦軸に示した。この例かられかるよ
うに、従来の圧電性磁器は０．５％／ ｔｉｍｅ ｄｅ
ｃａｄｅ程度もの経時変化を示している。この現象はフ
ィルタや発振子として加工した後で、その周波数が初期
の値から大きく変動してしまうため大きな問題となって
いる。In addition, the time-dependent change characteristics of the resonant frequency of the conventional example described above are
As shown by the broken line in the graph of the figure, piezoelectric porcelain made of conventional piezoelectric porcelain compositions also had a major problem in the change in resonance frequency over time. In FIG. 2, the elapsed time after the piezoelectric ceramic was polarized is shown on a logarithmic scale on the horizontal axis, and the rate of change in the resonance frequency is shown on the vertical axis. As can be seen from this example, conventional piezoelectric porcelain
It shows a change over time on the order of cade. This phenomenon is a serious problem because the frequency of the filter or oscillator changes significantly from its initial value after it is processed into a filter or oscillator.
さらに、Ｐ ｂ （Ｙ ｂ＋ｚｚ Ｎ ｂａｙ□）Ｏ，
−ＰｂＴｉｅｓ−ＰｂＺｒＯ，−ＭｎＯ，系で得られる
機械的品質係数Ｑｍは８００〜１０００程度とその範囲
が狭く任意の機械的品質係数Ｑｍを得ることができない
。Furthermore, P b (Y b + zz N bay□)O,
The mechanical quality factor Qm obtained with the -PbTies-PbZrO, -MnO system is in a narrow range of about 800 to 1000, making it impossible to obtain an arbitrary mechanical quality factor Qm.
それゆえに、この発明の主たる目的は、耐熱性が高く共
振周波数の経時変化が小さくしかも任意の機械的品質係
数を持つ圧電性磁器を得ることができる、圧電性磁器組
成物を提供することである。Therefore, the main object of the present invention is to provide a piezoelectric porcelain composition that is highly heat resistant, has a small change in resonance frequency over time, and can obtain a piezoelectric porcelain having an arbitrary mechanical quality factor. .
（課題を解決するための手段）
この発明は、Ｐｂ０−ＹｂｚＯ＋ ＮｂｚＯｓＴｉＯ
２− Ｚｒ０ｔの固溶体を構成する個々の酸化物組成
重量比率（重量％）がｐｂｏが６１゜０３〜７１．５７
、Ｙｂ１Ｏｉが０．１１〜９゜６９、Ｎｂ、Ｏ，が０．
０７〜６．６９、ＴｉＯ２が０．００〜１８．３２、お
よびＺｒＯ２が１０．２８〜３６．３６である主成分に
対し、副成分として、Ｃｒ、Ｏ，を０．０２〜２．００
重量％およびＭｎＯ，を０．０１〜２．００重量％含有
する、圧電性磁器組成物である。(Means for solving the problem) This invention provides Pb0-YbzO+NbzOsTiO
2- The weight ratio (wt%) of the individual oxides constituting the solid solution of Zr0t is pbo 61°03 to 71.57
, Yb1Oi is 0.11-9°69, Nb, O, is 0.
07 to 6.69, TiO2 is 0.00 to 18.32, and ZrO2 is 10.28 to 36.36, and Cr, O, as subcomponents are 0.02 to 2.00.
It is a piezoelectric ceramic composition containing 0.01 to 2.00% by weight of MnO.
（発明の効果）
この発明によれば、耐熱性が高く共振周波数の経時変化
が小さくしかも任意の機械的品質係数を持つ圧電性磁器
を得ることができる、圧電性磁器組成物が得られる。(Effects of the Invention) According to the present invention, a piezoelectric porcelain composition can be obtained that has high heat resistance, a small change in resonance frequency over time, and can provide a piezoelectric porcelain having an arbitrary mechanical quality factor.
この発明の上述の目的、その他の目的、特徴および利点
は、図面を参照して行う以下の実施例の詳細な説明から
一層明らかとなろう。The above objects, other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments with reference to the drawings.
（実施例）
まず、出発原料としてＰｂＯ，Ｙｂｇ○３．Ｎｂ２０５
、ＴｉＯ２、Ｚｒ０ｔ 、Ｃｒ２０：ｌおよびＭｎＯ
，を使用し、これらの粉末を表１に示す組成になるよう
に秤量した。この原料粉末を湿式混合し乾燥した後、７
００〜９００℃で仮焼した。(Example) First, PbO, Ybg○3. Nb205
, TiO2, Zr0t, Cr20:l and MnO
, and these powders were weighed to have the composition shown in Table 1. After wet mixing and drying this raw material powder,
It was calcined at 00 to 900°C.
ついで、有機系バインダを加え、湿式粉砕し整粒した後
、成形圧Ｉｔ／ｃｄで成形して成形体を得た。Next, an organic binder was added, wet-pulverized and sized, and then molded at a molding pressure It/cd to obtain a molded body.
そして、成形体を１０００〜１２５０℃で焼成して磁器
を得た。得られた磁器の両生面に焼き付は電極を形成し
、５０〜８０℃の絶縁油中において２〜３ Ｋ Ｖ ／
＊＊の電圧で３０分間分極処理して圧電性磁器を得た
。Then, the molded body was fired at 1000 to 1250°C to obtain porcelain. The baked surfaces of the obtained porcelain form electrodes and are heated at 2 to 3 KV/in insulating oil at 50 to 80°C.
Piezoelectric porcelain was obtained by polarization treatment at a voltage of ** for 30 minutes.
得られた圧電性磁器について、それぞれ誘電率εｒ、径
方向の電気機械結合係数Ｋｐ（％）９機械的品質係数Ｑ
ｍおよび耐熱温度（’Ｃ）を測定した。それらの測定結
果を表２に示す。For the obtained piezoelectric porcelain, the dielectric constant εr, the radial electromechanical coupling coefficient Kp (%) 9 the mechanical quality coefficient Q
m and the heat resistance temperature ('C) were measured. The measurement results are shown in Table 2.
なお、圧電特性は、インピーダンス測定機により共振周
波数および反共振周波数を測定し、それらの測定値から
計算して求めた。また、耐熱温度は、試料を３分間保持
して、電気機械結合係数の値が初期値に対して９０％以
上の値を示す温度の中での最高温度である。Note that the piezoelectric characteristics were determined by measuring the resonance frequency and anti-resonance frequency using an impedance measuring device, and calculating from the measured values. Moreover, the heat-resistant temperature is the highest temperature among the temperatures at which the value of the electromechanical coupling coefficient is 90% or more of the initial value when the sample is held for 3 minutes.
次に、表１および２に基づいて、この発明の組成の限定
理由について説明する。Next, based on Tables 1 and 2, the reasons for limiting the composition of the present invention will be explained.
■ＰｂＯが６１．０３重量％未満あるいは７１．５７重
量％を超えると、焼結性が悪く、比誘電率が小さく、電
気機械結合係数が小さく、耐熱性が低下する（試料番号
２および５参照）。■If PbO is less than 61.03% by weight or more than 71.57% by weight, sinterability will be poor, the dielectric constant will be small, the electromechanical coupling coefficient will be small, and the heat resistance will decrease (see sample numbers 2 and 5). ).
■ＹｂｚＯａが０．１１重量％未満では耐熱性の向上が
みられないだけでなく、比誘電率が小さく、電気機械結
合係数も小さい。また、Ｙｂ２０、が９．６９重量％を
超えると、耐熱性が低下するし、比誘電率が小さく、電
気機械結合係数も小さい（試料番号６および９参照）。(2) When YbzOa is less than 0.11% by weight, not only is no improvement in heat resistance observed, but the relative permittivity is small and the electromechanical coupling coefficient is also small. Furthermore, if Yb20 exceeds 9.69% by weight, the heat resistance decreases, the dielectric constant is small, and the electromechanical coupling coefficient is also small (see sample numbers 6 and 9).
■ＮｂｇＯｓが０．０７重量％未満では所望の高い電気
機械結合係数が得られないし、耐熱性が低下する。また
、Ｎｂ２Ｏ２が６．６９重量％を超えると、耐熱性が低
下するし、比誘電率が小さく、電気機械結合係数も小さ
い（試料番号１０および１３参照）。(2) If NbgOs is less than 0.07% by weight, a desired high electromechanical coupling coefficient cannot be obtained and heat resistance is reduced. Furthermore, when Nb2O2 exceeds 6.69% by weight, the heat resistance decreases, the dielectric constant is small, and the electromechanical coupling coefficient is also small (see sample numbers 10 and 13).
■Ｔｉｅ２が１８．３２重量％を超えると、所望の高い
電気機械結合係数が得られないし、比誘電率が小さく、
耐熱性が低下する（試料番号１５参照）。■If Tie2 exceeds 18.32% by weight, the desired high electromechanical coupling coefficient cannot be obtained, and the dielectric constant is small.
Heat resistance decreases (see sample number 15).
■ＺｒＯ，が１０．２８重量％未満あるいは３６．３６
重量％を超えると、所望の高い電気機械結合係数が得ら
れないし、比誘電率が小さく、耐熱性が低下する（試料
番号１６および１９参照）。■ZrO, less than 10.28% by weight or 36.36%
If it exceeds % by weight, the desired high electromechanical coupling coefficient cannot be obtained, the dielectric constant is low, and the heat resistance is decreased (see sample numbers 16 and 19).
■ＣｒｚＯ，，が０．０１重量％未満では機械的品質係
数が低く、２．０重量％を超えると耐熱性が低下する（
試料番号２０．２２および３０参照）。■When CrzO,, is less than 0.01% by weight, the mechanical quality factor is low, and when it exceeds 2.0% by weight, heat resistance decreases (
(See sample numbers 20.22 and 30).
０ＭｎＯ２が０．０２重量％未満では機械的品質係数が
低く、２．０重量％を超えると耐熱性が低下する（試料
番号２０．２１および３１参照）。When 0MnO2 is less than 0.02% by weight, the mechanical quality factor is low, and when it exceeds 2.0% by weight, heat resistance is decreased (see sample numbers 20.21 and 31).
また、この発明の実施例としての試料番号ｌの耐熱特性
および共振周波数の経時変化特性を、第１図および第２
図のグラフにそれぞれ実線で示した。In addition, the heat resistance characteristics and the time-dependent change characteristics of the resonant frequency of sample number 1 as an example of the present invention are shown in FIGS. 1 and 2.
Each is indicated by a solid line in the graph of the figure.
第１図のグラフから明らかなように、この発明の範囲内
の実施例では、従来例と比べて、３００℃程度とキュリ
ー点が大きく、しかも、キュリー点直下まで電気機械結
合係数が大きく劣化することがなく高い耐熱性を示すこ
とがわかる。As is clear from the graph in FIG. 1, in the embodiment within the scope of the present invention, the Curie point is approximately 300°C, which is higher than that of the conventional example, and furthermore, the electromechanical coupling coefficient deteriorates significantly to just below the Curie point. It can be seen that it exhibits high heat resistance without any problems.
また、第２図のグラフから明らかなように、この発明の
範囲内の実施例では、共振周波数の経時変化についても
０．１％／ｌｉｍｅ ｄｅｃａｄｅ以下と従来例より小
さく、高安定な圧電素子を得ることができることがわか
る。In addition, as is clear from the graph of FIG. 2, in the embodiment within the scope of the present invention, the change in resonance frequency over time is less than 0.1%/lime decade, which is smaller than the conventional example, and a highly stable piezoelectric element is manufactured. I know what I can get.
しかも、この発明の範囲内の組成物では、その組成比を
選ぶことによって、電気機械結合係数が６０％より大き
く比誘電率が１０００より大きい優れた特性を有する圧
電性磁器を得ることができる。Furthermore, with the composition within the scope of the present invention, by selecting the composition ratio, piezoelectric porcelain having excellent properties with an electromechanical coupling coefficient of more than 60% and a relative dielectric constant of more than 1000 can be obtained.
さらに、この発明の範囲内の組成物では、Ｃｒ２Ｏ３あ
るいはＭｎＯ，の量を調整することによって、１５０〜
１５００程度の任意の機械的品質係数を得ることができ
る。Furthermore, in the composition within the scope of this invention, by adjusting the amount of Cr2O3 or MnO,
Any mechanical quality factor on the order of 1500 can be obtained.
以上のように、この発明によれば、大きな電気機械結合
係数を有し、高い耐熱性、小さい共振周波数の経時変化
および任意の機械的品質係数を持つ圧電性磁器を得るこ
とができる。As described above, according to the present invention, it is possible to obtain piezoelectric porcelain having a large electromechanical coupling coefficient, high heat resistance, small change in resonance frequency over time, and an arbitrary mechanical quality factor.
第１図はこの発明の一実施例および従来例の耐熱特性を
示すグラフである。
第２図はこの発明の一実施例および従来例の共振周波数
の経時変化特性を示すグラフである。
特許出願人 株式会社 村田製作所
代理人 弁理士 岡 １） 全 啓FIG. 1 is a graph showing the heat resistance characteristics of an embodiment of the present invention and a conventional example. FIG. 2 is a graph showing the temporal change characteristics of the resonant frequency of an embodiment of the present invention and a conventional example. Patent applicant Murata Manufacturing Co., Ltd. Representative Patent attorney Oka 1) Kei Zen
Claims (1)
２−ＺｒＯ＿２の固溶体を構成する個々の酸化物組成重
量比率（重量％）が ＰｂＯが６１．０３〜７１．５７、 Ｙｂ＿２Ｏ＿３が０．１１〜９．６９、 Ｎｂ＿２Ｏ＿５が０．０７〜６．６９、 ＴｉＯ＿２が０．００〜１８．３２、およびＺｒＯ＿２
が１０．２８〜３６．３６ である主成分に対し、 副成分として、Ｃｒ＿２Ｏ＿３を０．０２〜２．００重
量％およびＭｎＯ＿２を０．０１〜２．００重量％含有
する、圧電性磁器組成物。[Claims] PbO-Yb_2O_3-Nb_2O_5-TiO_
The individual oxide composition weight ratios (wt%) constituting the solid solution of 2-ZrO_2 are 61.03 to 71.57 for PbO, 0.11 to 9.69 for Yb_2O_3, and 0.07 to 6.69 for Nb_2O_5. TiO_2 is 0.00 to 18.32, and ZrO_2
A piezoelectric porcelain composition containing 0.02 to 2.00% by weight of Cr_2O_3 and 0.01 to 2.00% by weight of MnO_2 as subcomponents, with respect to the main component having a value of 10.28 to 36.36. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2163532A JPH0455366A (en) | 1990-06-20 | 1990-06-20 | Piezoelectric porcelain composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2163532A JPH0455366A (en) | 1990-06-20 | 1990-06-20 | Piezoelectric porcelain composition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0455366A true JPH0455366A (en) | 1992-02-24 |
Family
ID=15775668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2163532A Pending JPH0455366A (en) | 1990-06-20 | 1990-06-20 | Piezoelectric porcelain composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455366A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111908915A (en) * | 2020-06-19 | 2020-11-10 | 华南理工大学 | Lead-lanthanum zirconate titanate-based piezoelectric ceramic and preparation method and application thereof |
-
1990
- 1990-06-20 JP JP2163532A patent/JPH0455366A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111908915A (en) * | 2020-06-19 | 2020-11-10 | 华南理工大学 | Lead-lanthanum zirconate titanate-based piezoelectric ceramic and preparation method and application thereof |
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