JPH03215357A - Piezoelectric ceramic composition - Google Patents

Piezoelectric ceramic composition

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Publication number
JPH03215357A
JPH03215357A JP2011002A JP1100290A JPH03215357A JP H03215357 A JPH03215357 A JP H03215357A JP 2011002 A JP2011002 A JP 2011002A JP 1100290 A JP1100290 A JP 1100290A JP H03215357 A JPH03215357 A JP H03215357A
Authority
JP
Japan
Prior art keywords
heat resistance
composition
piezoelectric
piezoelectric ceramic
ceramic composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011002A
Other languages
Japanese (ja)
Inventor
Toshiaki Kachi
敏晃 加地
Toshihiko Kikko
橘高 敏彦
Hiroshi Tamura
博 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2011002A priority Critical patent/JPH03215357A/en
Publication of JPH03215357A publication Critical patent/JPH03215357A/en
Pending legal-status Critical Current

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  • Compositions Of Oxide Ceramics (AREA)

Abstract

PURPOSE:To provide a composition having high heat resistance and small change with the passage of time in resonance frequency by specifying each oxide composition ratio of components in a ceramic composition consisting of solid solution of PbO-NiO-Yb2O3-Nb2O5-TiO2-ZrO2. CONSTITUTION:The objective piezoelectric ceramic composition consisting of 64.59-69.97wt.% PbO, 0.07-1.56wt.% NiO, 0.29-5.99wt.% Yb2O3, 0.47-9.24wt.% Nb2O5, 4.62-15.02wt.% TiO2 and 7.35-22.38wt.% ZrO2. The composition has high heat resistance and small change with the passage of time in resonance frequency. In the above-mentioned composition, if each weight ratio of PbO, NiO, Yb2O3, Nb2O5, TiO2 and ZrO2 is out of the above-mentioned range, heat resistance becomes low and piezoelectric deterioration starts from a temp. >=100 deg.C lower when heated with soldering, etc.

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は圧電性磁器組成物に関し、特にたとえばセラ
ミソクフィルタ、セラミソク発振子、セラミンクディス
クリミネータおよび表面弾性波素子などに用いられる、
圧電性磁器組成物に関する.(従来技術) 従来、圧電性磁器組成物は、P b T i O ,P
bZr03の2元系にB iz O3.Crz Ch 
+MnO.,ZnOなどの添加物を加えて、圧電特性の
改善を図ることが試みられている。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) This invention relates to a piezoelectric ceramic composition, particularly used for ceramic filters, ceramic oscillators, ceramic discriminators, surface acoustic wave elements, etc.
Concerning piezoelectric porcelain compositions. (Prior Art) Conventionally, piezoelectric ceramic compositions include P b T i O , P
Biz O3. to the binary system of bZr03. Crz Ch
+MnO. Attempts have been made to improve the piezoelectric properties by adding additives such as , ZnO, and the like.

さらに、PbTiOz  PbZrO+  Pb (M
 n l/3 N b !/3 ) 03系およびPb
TiO,PbZr03  Pb (Mg+zs Nbz
is ) 03系などの3元系の圧電性磁器組成物も、
開発されている。
Furthermore, PbTiOz PbZrO+ Pb (M
n l/3 N b! /3) 03 series and Pb
TiO, PbZr03 Pb (Mg+zs Nbz
is ) ternary piezoelectric ceramic compositions such as 03 series,
being developed.

また、特公昭45−37907号には、Pb(Njl/
3 Nbzz+ )03 PbTiOz  PbZr0
3系の圧電性磁器組成物が、開示されている。
In addition, in Special Publication No. 1979-37907, Pb(Njl/
3 Nbzz+ )03 PbTiOz PbZr0
Three series of piezoelectric ceramic compositions are disclosed.

(発明が解決しようとする課題) しかしながら、このような従来の圧電性磁器組成物では
、耐熱性および共振周波数の経時変化特性などに大きな
問題を有している。
(Problems to be Solved by the Invention) However, such conventional piezoelectric ceramic compositions have major problems in heat resistance, resonant frequency change characteristics over time, and the like.

従来例としてたとえばP b ( (M g l/3 
N b 2/s ) o.otT j o.stZ r
 11.4&} Osの耐熱特性を第1図のグラフに破
線で示すように、従来の圧電性磁器組成物では、それを
加熱していくと、キエリー点よりも約100℃以上低い
温度から徐々に熱による脱分極を起こし、圧電特性の劣
化が始まる。
As a conventional example, for example, P b ((M g l/3
Nb2/s) o. otT j o. stZ r
11.4 &} As shown by the broken line in the graph of Figure 1, the heat resistance properties of Os are shown by the broken line in the graph of Figure 1. When a conventional piezoelectric porcelain composition is heated, the temperature gradually decreases from about 100 degrees Celsius or more below the Chierie point. depolarization due to heat occurs, and the piezoelectric properties begin to deteriorate.

このため、その圧電性磁器組成物の使用上限温度は、キ
ュリー点よりはるかに下の2O0℃付近に限定されてい
る。この原因は、第3成分固溶によってキュリー点が低
下してしまうことと、圧電性磁器組成物が本質的に脱分
極を起こしやすいことが挙げられる。
For this reason, the upper limit temperature for use of the piezoelectric porcelain composition is limited to around 200° C., which is far below the Curie point. The reasons for this are that the Curie point is lowered by solid solution of the third component and that the piezoelectric ceramic composition is inherently prone to depolarization.

その一方で近年、電子部品のチップ化が進み、小型の表
面実装が可能な圧電素子、すなわちセラミックフィルタ
、セラミック発振子ディスクリミネー夕、トラップなど
のチップ素子が開発されている.従来のリード付樹脂モ
ールド素子や金属ケースに封入された素子では、はんだ
付け実装時に圧電セラミソクの温度上昇は2O0℃程度
に抑えられているが、これらのチップ素子では、はんだ
付けのときに圧電セラミソクも300℃程度の高温にさ
らされる。
On the other hand, in recent years, electronic components have become more and more chip-based, and chip elements such as small piezoelectric elements that can be surface mounted, such as ceramic filters, ceramic oscillator discriminators, and traps, have been developed. With conventional resin molded elements with leads or elements sealed in metal cases, the temperature rise of the piezoelectric ceramic socket during soldering is suppressed to about 200°C. It is also exposed to high temperatures of around 300°C.

したがって、従来の圧電性磁器組成物では、耐熱性にお
いて高信顛性のチップ部品を作ることが不可能である。
Therefore, with conventional piezoelectric ceramic compositions, it is impossible to produce chip components that are heat resistant and highly reliable.

また、上述の従来例の共振周波数の経時変化特性を第2
図のグラフに破線で示すように、従来の圧電性磁器組成
物では、共振周波数の経時変化にも大きな問題があった
。第2図には圧電セラミックを分極処理してからの経過
時間を横軸に対数目盛りで示し、共振周波数の変化率を
縦軸に示した.この例からわかるように、従来の圧電性
磁器組成物は0.5%/ time decade程度
もの経時変化を示している。この現象はフィルタや発振
子として加工した後で、その周波数が初期の値から大き
く変動してしまうため大きな問題となっている。
In addition, the time-dependent change characteristics of the resonant frequency of the conventional example described above are
As shown by the broken line in the graph of the figure, conventional piezoelectric ceramic compositions also had a major problem in the change in resonance frequency over time. In Figure 2, the elapsed time after the piezoelectric ceramic was polarized is shown on a logarithmic scale on the horizontal axis, and the rate of change in the resonance frequency is shown on the vertical axis. As can be seen from this example, the conventional piezoelectric ceramic composition shows a change over time of about 0.5%/time decade. This phenomenon is a serious problem because the frequency of the filter or oscillator changes significantly from its initial value after it is processed into a filter or oscillator.

それゆえに、この発明の主たる目的は、耐熱性が高く、
しかも共振周波数の経時変化が小さい圧電性磁器組成物
を提供することである。
Therefore, the main purpose of this invention is to have high heat resistance and
Moreover, it is an object of the present invention to provide a piezoelectric ceramic composition whose resonance frequency changes little over time.

(課題を解決するための手段) この発明は、P b O  N i O  Y b !
 03Nbz Os  TiOg  ZrOzの固溶体
からなる磁器組成物において、磁器組成物を構成する個
々の酸化物組成重量比率(重量%)がpboが6459
〜69.97、NiOが0.07〜1.56、ybto
sが0.29〜5.99、Nb, 05が0.47〜9
.24、T i O zが4.62〜15.02、およ
びZrOtが7.35〜22.38である、圧電性磁器
組成物である。
(Means for Solving the Problems) This invention provides P b O N i O Y b!
In a ceramic composition consisting of a solid solution of 03Nbz Os TiOg ZrOz, the weight ratio (weight %) of each oxide constituting the ceramic composition is such that pbo is 6459.
~69.97, NiO is 0.07~1.56, ybto
s is 0.29 to 5.99, Nb, 05 is 0.47 to 9
.. 24, a piezoelectric ceramic composition having T i O z of 4.62 to 15.02 and ZrOt of 7.35 to 22.38.

(発明の効果) この発明によれば、耐熱性が高く、しかも共振周波数の
経時変化が小さい圧電性磁器組成物が得られる。
(Effects of the Invention) According to the present invention, a piezoelectric ceramic composition having high heat resistance and a small change in resonance frequency over time can be obtained.

この発明の上述の目的,その他の目的,特徴および利点
は、図面を参照して行う以下の実施例の詳細な説明から
一層明らかとなろう。
The above objects, other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments with reference to the drawings.

(実施例) まず、出発原料としてPbO.Nip,Yb,03 ,
N bt Os .T i OxおよびZrO.を使用
し、これらの粉末を表1に示す組成になるように秤量し
た。この原料粉末を湿式混合し乾燥した後、700〜9
00℃で仮焼した.ついで、有機系バインダを加え、湿
式粉砕し整粒した後、成形圧It/一で成形して成形体
を得た。そして、成形体を1000〜1250℃で焼成
して磁器を得た。得られた磁器の両主面に焼き付け電極
を形成し、50〜80℃の絶縁油中において2〜3KV
/鶴の電圧で30分間分極処理して圧電性磁器組成物を
得た。
(Example) First, PbO. Nip,Yb,03,
NbtOs. T i Ox and ZrO. These powders were weighed to have the composition shown in Table 1. After wet mixing and drying this raw material powder,
Calcined at 00℃. Next, an organic binder was added, wet-pulverized and sized, and then molded at a molding pressure It/1 to obtain a molded product. Then, the molded body was fired at 1000 to 1250°C to obtain porcelain. Baked electrodes were formed on both main surfaces of the obtained porcelain, and a voltage of 2 to 3 KV was applied in insulating oil at 50 to 80°C.
/Tsuru voltage for 30 minutes to obtain a piezoelectric ceramic composition.

得られた圧電性磁器組成物について、それぞれ誘電率(
εr),径方向の電気機械結合係数(Kp),機械的品
質係数(Qm)および耐熱温度(℃)を測定した。それ
らの測定結果を表2に示す.なお、圧電特性は、インピ
ーダンス測定機により共振周波数および反共振周波数を
測定し、それらの測定値から計算して求めた.また、耐
熱温度は、試料を3分間保持して、電気機械結合係数の
値が初期値に対して90%以上の値を示す温度の中での
最高温度である。
The dielectric constant (
εr), radial electromechanical coupling coefficient (Kp), mechanical quality coefficient (Qm), and heat resistance temperature (°C) were measured. Table 2 shows the measurement results. The piezoelectric characteristics were determined by measuring the resonant frequency and anti-resonant frequency using an impedance measuring device and calculating from these measured values. Moreover, the heat-resistant temperature is the highest temperature among the temperatures at which the value of the electromechanical coupling coefficient is 90% or more of the initial value when the sample is held for 3 minutes.

次に、表1および2に基づいて、この発明の組成の限定
理由について説明する. ■PbOが64.59重量%未満あるいは69.97重
量%を餡えると、耐熱温度が低く、はんだ付けなどによ
って加熱されると100’e以上低い温度から圧電特性
が劣化してしまうからである(試料番号2および5参照
). ■NiOが0.07重量%未満あるいは1.56重量%
を超えると、耐熱温度が低く、はんだ付けなどによって
加熱されると100’C以上低い温度から圧電特性が劣
化してしまうからである(試料番号6および9参照)。
Next, based on Tables 1 and 2, the reasons for limiting the composition of the present invention will be explained. ■If PbO is less than 64.59% by weight or 69.97% by weight, the heat resistance temperature will be low, and when heated by soldering etc., the piezoelectric properties will deteriorate from a temperature lower than 100'e. (See sample numbers 2 and 5). ■NiO is less than 0.07% by weight or 1.56% by weight
This is because if the temperature exceeds 100°C, the heat resistance is low, and when heated by soldering or the like, the piezoelectric properties deteriorate from a temperature lower than 100'C (see sample numbers 6 and 9).

■Yb,o,が0.29重量%未満あるいは5.99重
量%を超えると、耐熱温度が低く、はんだ付けなどによ
って加熱されると1oo℃以上低い温度から圧電特性が
劣化してしまうからである(試料番号10および13参
照)。
■When Yb,o, is less than 0.29% by weight or exceeds 5.99% by weight, the heat resistance is low, and when heated by soldering etc., the piezoelectric properties deteriorate from a temperature lower than 100°C. Yes (see sample numbers 10 and 13).

■Nb,oSが0.47重量%未満あるいは9.24重
量%を超えると、耐熱温度が低く、はんだ付けなどによ
って加熱されると100℃以上低い温度から圧電特性が
劣化してしまうからである(試料番号14および17参
照). ■T i O.が4.62重量%未満あるいは15.0
2重量%を超えると、耐熱温度が低く、はんだ付けなど
によって加熱されると100℃以上低い温度から圧電特
性が劣化してしまうからである(試料番号18および2
1参照)。
■If Nb and oS are less than 0.47% by weight or more than 9.24% by weight, the heat resistance is low, and when heated by soldering etc., the piezoelectric properties will deteriorate from temperatures as low as 100°C or more. (See sample numbers 14 and 17). ■T i O. is less than 4.62% by weight or 15.0
This is because if it exceeds 2% by weight, the heat resistance is low, and when heated by soldering etc., the piezoelectric properties deteriorate from a temperature lower than 100°C (sample numbers 18 and 2).
(see 1).

■ZrOzが7.35重量%未満あるいは22.33重
量%を超えると、耐熱温度が低く、はんだ付けなどによ
って加熱されると100℃以上低い温度から圧電特性が
劣化してしまうからである(試料番号22および25参
照)。
■If ZrOz is less than 7.35% by weight or exceeds 22.33% by weight, the heat resistance is low, and when heated by soldering etc., the piezoelectric properties will deteriorate from a temperature lower than 100°C (sample 22 and 25).

また、この発明の実施例としての試料番号1の耐熱特性
および共振周波数の経時変化特性を、第1図および第2
図のグラフにそれぞれ実線で示した。
In addition, the heat resistance characteristics and the time-dependent change characteristics of the resonant frequency of sample number 1 as an example of the present invention are shown in FIGS. 1 and 2.
Each is indicated by a solid line in the graph of the figure.

この発明の範囲内の実施例では、従来例と比べて、キュ
リー点が約350℃と大きく、しかも、第1図のグラフ
から明らかなように、キュリー点直下まで電気機械結合
係数が大きく劣化することがなく高い耐熱性を示すこと
がわかる。
In the embodiment within the scope of the present invention, the Curie point is approximately 350°C, which is higher than that of the conventional example, and as is clear from the graph in FIG. 1, the electromechanical coupling coefficient significantly deteriorates to just below the Curie point. It can be seen that it exhibits high heat resistance without any problems.

また、第2図のグラフから明らかなように、この発明の
範囲内の実施例では、共振周波数の経時変化についても
0.1%/time decade以下と従来例より小
さく、高安定な圧電素子を得ることができることがわか
る. 以上のように、この発明によれば、高い耐熱性および小
さい経時変化を持つ圧電性磁器組成物が得られる.
Moreover, as is clear from the graph in FIG. 2, in the embodiment within the scope of the present invention, the change in resonance frequency over time is less than 0.1%/time decade, which is smaller than the conventional example, and a highly stable piezoelectric element is manufactured. You can see that you can get it. As described above, according to the present invention, a piezoelectric ceramic composition having high heat resistance and small change over time can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例および従来例の耐熱特性を
示すグラフである。 第2図はこの発明の一実施例および従来例の共振周波数
の経時変化特性を示すグラフである。
FIG. 1 is a graph showing the heat resistance characteristics of an embodiment of the present invention and a conventional example. FIG. 2 is a graph showing the temporal change characteristics of the resonant frequency of an embodiment of the present invention and a conventional example.

Claims (1)

【特許請求の範囲】  PbO−NiO−Yb_2O_3−Nb_2O_5−
TiO_2−ZrO_2の固溶体からなる磁器組成物に
おいて、 前記磁器組成物を構成する個々の酸化物組成重量比率(
重量%)が PbOが64.59〜69.97、 NiOが0.07〜1.56、 Yb_2O_3が0.29〜5.99、 Nb_2O_5が0.47〜9.24、 TiO_2が4.62〜15.02、およびZrO_2
が7.35〜22.38 であることを特徴とする、圧電性磁器組成物。
[Claims] PbO-NiO-Yb_2O_3-Nb_2O_5-
In a ceramic composition consisting of a solid solution of TiO_2-ZrO_2, the composition weight ratio of each oxide (
weight%) is 64.59 to 69.97 for PbO, 0.07 to 1.56 for NiO, 0.29 to 5.99 for Yb_2O_3, 0.47 to 9.24 for Nb_2O_5, and 4.62 to 4.62 for TiO_2. 15.02, and ZrO_2
7.35 to 22.38.
JP2011002A 1990-01-19 1990-01-19 Piezoelectric ceramic composition Pending JPH03215357A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011002A JPH03215357A (en) 1990-01-19 1990-01-19 Piezoelectric ceramic composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011002A JPH03215357A (en) 1990-01-19 1990-01-19 Piezoelectric ceramic composition

Publications (1)

Publication Number Publication Date
JPH03215357A true JPH03215357A (en) 1991-09-20

Family

ID=11765918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011002A Pending JPH03215357A (en) 1990-01-19 1990-01-19 Piezoelectric ceramic composition

Country Status (1)

Country Link
JP (1) JPH03215357A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100305167B1 (en) * 1997-12-03 2001-11-14 모리시타 요이찌 Piezoelectric ceramic composition and piezoelectric device using the same
KR100358048B1 (en) * 1999-12-27 2002-10-25 주식회사 하이닉스반도체 Method of fabrication a piezoelectric ceramics

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100305167B1 (en) * 1997-12-03 2001-11-14 모리시타 요이찌 Piezoelectric ceramic composition and piezoelectric device using the same
KR100358048B1 (en) * 1999-12-27 2002-10-25 주식회사 하이닉스반도체 Method of fabrication a piezoelectric ceramics

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