JPH0455308A - 多結晶シリコンシート原板の製造方法 - Google Patents

Info

Publication number

JPH0455308A

JPH0455308A JP16634890A JP16634890A JPH0455308A JP H0455308 A JPH0455308 A JP H0455308A JP 16634890 A JP16634890 A JP 16634890A JP 16634890 A JP16634890 A JP 16634890A JP H0455308 A JPH0455308 A JP H0455308A

Authority

JP

Japan

Prior art keywords

mold

susceptor

silicon

molten silicon

temperature

Prior art date

1990-06-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 65
• 229910052710 silicon Inorganic materials 0.000 title claims abstract description 65
• 239000010703 silicon Substances 0.000 title claims abstract description 65
• 238000004519 manufacturing process Methods 0.000 title claims description 17
• 239000000463 material Substances 0.000 claims abstract description 6
• 238000000465 moulding Methods 0.000 claims description 25
• 238000000034 method Methods 0.000 claims description 16
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 10
• 238000002844 melting Methods 0.000 claims description 4
• 230000008018 melting Effects 0.000 claims description 4
• 238000003825 pressing Methods 0.000 claims description 2
• 238000002347 injection Methods 0.000 abstract description 8
• 239000007924 injection Substances 0.000 abstract description 8
• 239000007789 gas Substances 0.000 description 9
• 239000011261 inert gas Substances 0.000 description 3
• 238000006243 chemical reaction Methods 0.000 description 2
• 238000007796 conventional method Methods 0.000 description 2
• 238000010586 diagram Methods 0.000 description 2
• 230000013011 mating Effects 0.000 description 2
• 239000010453 quartz Substances 0.000 description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
• 229910052799 carbon Inorganic materials 0.000 description 1
• 238000005266 casting Methods 0.000 description 1
• 239000000919 ceramic Substances 0.000 description 1
• 239000003795 chemical substances by application Substances 0.000 description 1
• 238000010924 continuous production Methods 0.000 description 1
• 239000000112 cooling gas Substances 0.000 description 1
• 239000013078 crystal Substances 0.000 description 1
• 238000005520 cutting process Methods 0.000 description 1
• 230000007812 deficiency Effects 0.000 description 1
• 230000002950 deficient Effects 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• 210000000936 intestine Anatomy 0.000 description 1
• 229920001296 polysiloxane Polymers 0.000 description 1
• 238000005086 pumping Methods 0.000 description 1
• 238000000926 separation method Methods 0.000 description 1
• 238000007711 solidification Methods 0.000 description 1
• 230000008023 solidification Effects 0.000 description 1

Cited By (1)