JPH0454481Y2 - - Google Patents

Info

Publication number
JPH0454481Y2
JPH0454481Y2 JP3136085U JP3136085U JPH0454481Y2 JP H0454481 Y2 JPH0454481 Y2 JP H0454481Y2 JP 3136085 U JP3136085 U JP 3136085U JP 3136085 U JP3136085 U JP 3136085U JP H0454481 Y2 JPH0454481 Y2 JP H0454481Y2
Authority
JP
Japan
Prior art keywords
displacement
flexible plate
driving
micro
laminated piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3136085U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61147405U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3136085U priority Critical patent/JPH0454481Y2/ja
Publication of JPS61147405U publication Critical patent/JPS61147405U/ja
Application granted granted Critical
Publication of JPH0454481Y2 publication Critical patent/JPH0454481Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
JP3136085U 1985-03-05 1985-03-05 Expired JPH0454481Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3136085U JPH0454481Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-03-05 1985-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3136085U JPH0454481Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-03-05 1985-03-05

Publications (2)

Publication Number Publication Date
JPS61147405U JPS61147405U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-11
JPH0454481Y2 true JPH0454481Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-21

Family

ID=30531898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3136085U Expired JPH0454481Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-03-05 1985-03-05

Country Status (1)

Country Link
JP (1) JPH0454481Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2792667B2 (ja) * 1989-03-09 1998-09-03 株式会社日立製作所 板状柔軟構造物の振動抑制装置

Also Published As

Publication number Publication date
JPS61147405U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-11

Similar Documents

Publication Publication Date Title
EP0510698B1 (en) Displacement amplification mechanism using piezoelectric element
EP1093685A1 (en) Solid-state receiver
JPS6162369A (ja) 圧電素子を用いたアクチユエ−タ
CN111030505A (zh) 二次位移放大型压电驱动器
US6411010B1 (en) Piezoelectric actuator
JPH1190867A (ja) マイクロマニピュレータ
JPH0454481Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
WO2007077878A1 (ja) 気体圧制御アクチュエータ、気体圧制御アクチュエータ用気体軸受機構及び気体圧制御アクチュエータを用いた微小変位出力装置
CN110224634A (zh) 压电陶瓷位移驱动器
CN209731109U (zh) 压电陶瓷位移驱动器
CN115395818A (zh) 压电驱动装置
CN113630036A (zh) 一种驻波型压电超声电机运动分辨率提升装置和方法
Takahashi Multilayer piezo-ceramic actuators and their applications
JPH05305574A (ja) 圧電クランプ機構
JPH0434039Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN111377397A (zh) 一种微纳加工系统及控制方法
JPH01238759A (ja) ６自由度精密微動台
JPS59150756A (ja) 印字機構
JPS63226083A (ja) 圧電アクチユエ−タ
JPS62159088A (ja) 移動ステ−ジ装置
JP2639818B2 (ja) 印字ヘッド用アクチュエータ
JPH0131491Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6147272A (ja) 機械的増幅機構
CN115940691A (zh) 法向准零刚度、切向高刚度的夹持机构
JPH0413175Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)