JPH0453836B2 - - Google Patents

Info

Publication number
JPH0453836B2
JPH0453836B2 JP13978886A JP13978886A JPH0453836B2 JP H0453836 B2 JPH0453836 B2 JP H0453836B2 JP 13978886 A JP13978886 A JP 13978886A JP 13978886 A JP13978886 A JP 13978886A JP H0453836 B2 JPH0453836 B2 JP H0453836B2
Authority
JP
Japan
Prior art keywords
aluminum nitride
nitride ceramics
aln
silicon oxide
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13978886A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62297286A (ja
Inventor
Hirozo Matsumoto
Toshe Shiina
Shizuyasu Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP13978886A priority Critical patent/JPS62297286A/ja
Publication of JPS62297286A publication Critical patent/JPS62297286A/ja
Publication of JPH0453836B2 publication Critical patent/JPH0453836B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP13978886A 1986-06-16 1986-06-16 窒化アルミニウムセラミツクスのメタライズ方法 Granted JPS62297286A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13978886A JPS62297286A (ja) 1986-06-16 1986-06-16 窒化アルミニウムセラミツクスのメタライズ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13978886A JPS62297286A (ja) 1986-06-16 1986-06-16 窒化アルミニウムセラミツクスのメタライズ方法

Publications (2)

Publication Number Publication Date
JPS62297286A JPS62297286A (ja) 1987-12-24
JPH0453836B2 true JPH0453836B2 (enEXAMPLES) 1992-08-27

Family

ID=15253440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13978886A Granted JPS62297286A (ja) 1986-06-16 1986-06-16 窒化アルミニウムセラミツクスのメタライズ方法

Country Status (1)

Country Link
JP (1) JPS62297286A (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2537653B2 (ja) * 1988-02-12 1996-09-25 株式会社日立製作所 窒化アルミニウム基板と製法及び半導体装置

Also Published As

Publication number Publication date
JPS62297286A (ja) 1987-12-24

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