JPH0453059U - - Google Patents
Info
- Publication number
- JPH0453059U JPH0453059U JP9361790U JP9361790U JPH0453059U JP H0453059 U JPH0453059 U JP H0453059U JP 9361790 U JP9361790 U JP 9361790U JP 9361790 U JP9361790 U JP 9361790U JP H0453059 U JPH0453059 U JP H0453059U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- tank
- evaporation
- rotary
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 10
- 238000007740 vapor deposition Methods 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims 5
- 230000008020 evaporation Effects 0.000 claims 5
- 238000000034 method Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9361790U JPH0453059U (enExample) | 1990-09-07 | 1990-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9361790U JPH0453059U (enExample) | 1990-09-07 | 1990-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453059U true JPH0453059U (enExample) | 1992-05-06 |
Family
ID=31830967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9361790U Pending JPH0453059U (enExample) | 1990-09-07 | 1990-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453059U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0288765A (ja) * | 1988-09-26 | 1990-03-28 | Tokuda Seisakusho Ltd | 真空処理装置 |
-
1990
- 1990-09-07 JP JP9361790U patent/JPH0453059U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0288765A (ja) * | 1988-09-26 | 1990-03-28 | Tokuda Seisakusho Ltd | 真空処理装置 |