JPH0451625U - - Google Patents
Info
- Publication number
- JPH0451625U JPH0451625U JP9341990U JP9341990U JPH0451625U JP H0451625 U JPH0451625 U JP H0451625U JP 9341990 U JP9341990 U JP 9341990U JP 9341990 U JP9341990 U JP 9341990U JP H0451625 U JPH0451625 U JP H0451625U
- Authority
- JP
- Japan
- Prior art keywords
- reflecting mirror
- angle detection
- reflector
- angle
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 12
- 238000010586 diagram Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Description
第１図は本考案を適用した反射鏡式偏向器の全
体構成を示す概略図、第２図は第１図の偏向器に
おける角度検出機構の構成図、第３図は第２図の
位置検出素子の構成図、第４図は従来の角度検出
装置を示す構成図である。
符号の説明、１１……反射鏡、１２……光源、
１３……回転軸、１４……アクチユエータ、１４
１……調和歯車変速機、１４２……ピエゾアクチ
ユエータ、２１……角度検出用反射鏡、２２……
角度検出用光源、２３……半導体位置検出素子。
Fig. 1 is a schematic diagram showing the overall configuration of a reflective mirror deflector to which the present invention is applied, Fig. 2 is a block diagram of the angle detection mechanism in the deflector of Fig. 1, and Fig. 3 is a position detection diagram of Fig. 2. A block diagram of the element, FIG. 4 is a block diagram showing a conventional angle detection device. Explanation of symbols, 11...Reflector, 12...Light source,
13... Rotating shaft, 14... Actuator, 14
1...Harmonic gear transmission, 142...Piezo actuator, 21...Angle detection reflector, 22...
Angle detection light source, 23... semiconductor position detection element.
Claims (1)
回転させる回転駆動手段とを有する反射鏡式偏向
器において、前記反射鏡と一体となつて回転され
る角度検出用反射鏡と、この角度検出用反射鏡に
光を照射する角度位置検出用光源と、前記角度検
出用反射鏡によつて反射された反射光を受け取り
、この反射光の入射位置を検出する位置検出手段
とを有し、前記位置検出手段の出力から反射鏡式
偏向器の前記反射鏡の回転角度を検出することを
特徴とする角度検出装置。 A reflecting mirror deflector having a rotatably supported reflecting mirror and a rotation drive means for rotating the reflecting mirror, which includes: a reflecting mirror for angle detection that is rotated integrally with the reflecting mirror; a light source for angular position detection that irradiates light onto a reflector for angle detection, and a position detection means that receives reflected light reflected by the angle detection reflector and detects an incident position of the reflected light; An angle detection device characterized in that a rotation angle of the reflecting mirror of a reflecting mirror type deflector is detected from an output of a position detecting means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9341990U JPH0451625U (en) | 1990-09-05 | 1990-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9341990U JPH0451625U (en) | 1990-09-05 | 1990-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0451625U true JPH0451625U (en) | 1992-04-30 |
Family
ID=31830612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9341990U Pending JPH0451625U (en) | 1990-09-05 | 1990-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451625U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012521005A (en) * | 2009-03-19 | 2012-09-10 | ゼネラル・エレクトリック・カンパニイ | Optical gauge and three-dimensional surface profile measuring method |
-
1990
- 1990-09-05 JP JP9341990U patent/JPH0451625U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012521005A (en) * | 2009-03-19 | 2012-09-10 | ゼネラル・エレクトリック・カンパニイ | Optical gauge and three-dimensional surface profile measuring method |
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