JPH0450801U - - Google Patents
Info
- Publication number
- JPH0450801U JPH0450801U JP9269290U JP9269290U JPH0450801U JP H0450801 U JPH0450801 U JP H0450801U JP 9269290 U JP9269290 U JP 9269290U JP 9269290 U JP9269290 U JP 9269290U JP H0450801 U JPH0450801 U JP H0450801U
- Authority
- JP
- Japan
- Prior art keywords
- beams
- substrate
- substrate holder
- interference exposure
- beam interference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 6
- 239000003504 photosensitizing agent Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9269290U JPH0450801U (OSRAM) | 1990-09-05 | 1990-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9269290U JPH0450801U (OSRAM) | 1990-09-05 | 1990-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0450801U true JPH0450801U (OSRAM) | 1992-04-28 |
Family
ID=31829352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9269290U Pending JPH0450801U (OSRAM) | 1990-09-05 | 1990-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0450801U (OSRAM) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6169021A (ja) * | 1984-09-12 | 1986-04-09 | Sharp Corp | 光学装置 |
-
1990
- 1990-09-05 JP JP9269290U patent/JPH0450801U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6169021A (ja) * | 1984-09-12 | 1986-04-09 | Sharp Corp | 光学装置 |
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