Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC CorpfiledCriticalSMC Corp
Priority to JP2309485ApriorityCriticalpatent/JPS61184205A/ja
Priority to DE19853515499prioritypatent/DE3515499C2/de
Publication of JPS61184205ApublicationCriticalpatent/JPS61184205A/ja
Priority to US07/341,269prioritypatent/US4898200A/en
Publication of JPH0450441B2publicationCriticalpatent/JPH0450441B2/ja