JPH0449015B2 - - Google Patents
Info
- Publication number
- JPH0449015B2 JPH0449015B2 JP63171047A JP17104788A JPH0449015B2 JP H0449015 B2 JPH0449015 B2 JP H0449015B2 JP 63171047 A JP63171047 A JP 63171047A JP 17104788 A JP17104788 A JP 17104788A JP H0449015 B2 JPH0449015 B2 JP H0449015B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- chamber
- supply duct
- ultra
- constant temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000002156 mixing Methods 0.000 claims description 43
- 238000004140 cleaning Methods 0.000 claims description 13
- 230000001143 conditioned effect Effects 0.000 claims description 13
- 235000019592 roughness Nutrition 0.000 claims description 9
- 238000011144 upstream manufacturing Methods 0.000 claims description 6
- 238000012856 packing Methods 0.000 claims description 4
- 239000011800 void material Substances 0.000 claims description 2
- 239000003570 air Substances 0.000 description 85
- 230000000052 comparative effect Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 238000005259 measurement Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000003507 refrigerant Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 241000287227 Fringillidae Species 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 238000004887 air purification Methods 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Landscapes
- Other Air-Conditioning Systems (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17104788A JPH0221142A (ja) | 1988-07-11 | 1988-07-11 | 超恒温清浄チャンバー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17104788A JPH0221142A (ja) | 1988-07-11 | 1988-07-11 | 超恒温清浄チャンバー |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5206850A Division JP2732345B2 (ja) | 1993-07-30 | 1993-07-30 | 超恒温清浄チヤンバー |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0221142A JPH0221142A (ja) | 1990-01-24 |
| JPH0449015B2 true JPH0449015B2 (US20110009641A1-20110113-C00116.png) | 1992-08-10 |
Family
ID=15916098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17104788A Granted JPH0221142A (ja) | 1988-07-11 | 1988-07-11 | 超恒温清浄チャンバー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221142A (US20110009641A1-20110113-C00116.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4492504B2 (ja) * | 2005-09-21 | 2010-06-30 | 株式会社日立プラントテクノロジー | 精密温度制御装置 |
| JP5113501B2 (ja) * | 2007-11-27 | 2013-01-09 | 高砂熱学工業株式会社 | 建屋のレイアウト |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0222025U (US20110009641A1-20110113-C00116.png) * | 1988-07-29 | 1990-02-14 | ||
| JPH0315955U (US20110009641A1-20110113-C00116.png) * | 1989-06-30 | 1991-02-18 |
-
1988
- 1988-07-11 JP JP17104788A patent/JPH0221142A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0222025U (US20110009641A1-20110113-C00116.png) * | 1988-07-29 | 1990-02-14 | ||
| JPH0315955U (US20110009641A1-20110113-C00116.png) * | 1989-06-30 | 1991-02-18 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0221142A (ja) | 1990-01-24 |
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