JPH0448871Y2 - - Google Patents

Info

Publication number
JPH0448871Y2
JPH0448871Y2 JP1987032252U JP3225287U JPH0448871Y2 JP H0448871 Y2 JPH0448871 Y2 JP H0448871Y2 JP 1987032252 U JP1987032252 U JP 1987032252U JP 3225287 U JP3225287 U JP 3225287U JP H0448871 Y2 JPH0448871 Y2 JP H0448871Y2
Authority
JP
Japan
Prior art keywords
cleaning
tank
liquid
liquid level
solvent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987032252U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63141690U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987032252U priority Critical patent/JPH0448871Y2/ja
Publication of JPS63141690U publication Critical patent/JPS63141690U/ja
Application granted granted Critical
Publication of JPH0448871Y2 publication Critical patent/JPH0448871Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP1987032252U 1987-03-05 1987-03-05 Expired JPH0448871Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987032252U JPH0448871Y2 (en, 2012) 1987-03-05 1987-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987032252U JPH0448871Y2 (en, 2012) 1987-03-05 1987-03-05

Publications (2)

Publication Number Publication Date
JPS63141690U JPS63141690U (en, 2012) 1988-09-19
JPH0448871Y2 true JPH0448871Y2 (en, 2012) 1992-11-17

Family

ID=30838754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987032252U Expired JPH0448871Y2 (en, 2012) 1987-03-05 1987-03-05

Country Status (1)

Country Link
JP (1) JPH0448871Y2 (en, 2012)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5172366U (en, 2012) * 1974-12-04 1976-06-07
JPS60125282A (ja) * 1983-12-13 1985-07-04 有限会社タス技術研究所 無塵洗浄乾燥装置
JPS6215824A (ja) * 1985-07-12 1987-01-24 Matsushita Electric Ind Co Ltd 半導体ウエハの処理方法

Also Published As

Publication number Publication date
JPS63141690U (en, 2012) 1988-09-19

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