JPH0448542U - - Google Patents

Info

Publication number
JPH0448542U
JPH0448542U JP9079890U JP9079890U JPH0448542U JP H0448542 U JPH0448542 U JP H0448542U JP 9079890 U JP9079890 U JP 9079890U JP 9079890 U JP9079890 U JP 9079890U JP H0448542 U JPH0448542 U JP H0448542U
Authority
JP
Japan
Prior art keywords
substrate
substrate holder
light source
light
parallel rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9079890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9079890U priority Critical patent/JPH0448542U/ja
Publication of JPH0448542U publication Critical patent/JPH0448542U/ja
Pending legal-status Critical Current

Links

JP9079890U 1990-08-29 1990-08-29 Pending JPH0448542U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9079890U JPH0448542U (en:Method) 1990-08-29 1990-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9079890U JPH0448542U (en:Method) 1990-08-29 1990-08-29

Publications (1)

Publication Number Publication Date
JPH0448542U true JPH0448542U (en:Method) 1992-04-24

Family

ID=31825835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9079890U Pending JPH0448542U (en:Method) 1990-08-29 1990-08-29

Country Status (1)

Country Link
JP (1) JPH0448542U (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07147218A (ja) * 1992-11-12 1995-06-06 Internatl Business Mach Corp <Ibm> ３次元結像システムおよび方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4885140A (en:Method) * 1972-02-14 1973-11-12
JPS52111432A (en) * 1976-03-16 1977-09-19 Pilot Precision Exposing method in photooetching

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4885140A (en:Method) * 1972-02-14 1973-11-12
JPS52111432A (en) * 1976-03-16 1977-09-19 Pilot Precision Exposing method in photooetching

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07147218A (ja) * 1992-11-12 1995-06-06 Internatl Business Mach Corp <Ibm> ３次元結像システムおよび方法

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